Precision Motorized XY Stage, XYZ-Stage, 6-Axis Stage Manufacturer – Motorized High Accuracy Mulit-Axis Positioners


Multi-Axis Precision Stages, XY, XYZ, 6-Axis Stages


Multi-axis motorized postioning stages from PI and PI miCos are designed for precision motion control applications from photonics alignment to medical design and semiconductor related test and manufacturing processes. In addition to standard positioners, air-bearing stages and high vacuum compatible versions are available.
Hexapod and SpaceFAB 6-axis positioners combine extreme flexibility and accuracy in a small package.

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Linear, Rotary, Multi-Axis
Positioners





Multi-Axis Stages (XY, XYZ)     6-Axis Hexapods / SpaceFABS







H-810 6-Axis Miniature 6-Axis Positioner, Motorized Hexapod Platform

Miniature Hexapod
  • Most-Compact Precision Hexapod Platform
  • Actuator Resolution 40 nanometers
  • Motorized Positioning Ranges 40x40x13mm, Rotation to 60 Degrees
  • Load Capacity to 5 kg
  • Min. Incremental Motion to 200 nm Reproducibility to ±0.5 Microns
  • Velocity to 10mm/second
  • Vacuum Option
  • Sophisticated Controller Using Vector Algorithms

This miniaturized precision hexapod platform is currently PI's smallest standard 6-axis micropositioning system to date (smaller custom systems are available). As all PI hexapod platforms it allows the user to change the center of rotation (pivot point) anywhere inside or outside the system envelope.

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H-811 Vacuum-Compatible Miniature Hexapod 6-Axis Positioner; High Precision and Very Versatile


  • Vacuum-Compatible Miniature Hexapod
  • Complete with Specialized Hexapod Controller and Software
  • Travel Ranges 34 x 32 x 13 mm, Rotation to 42 Degrees
  • Load Capacity to 5 kg
  • Actuator Resolution 40 nm
  • Min. Incremental Motion to 200 nm
  • Repeatability up to ±0.2 µm
  • Velocity to 10 mm/sec

PDF Brochure | Specifications, Drawings, Answers to Technical Questions
Vacuum Compatible Miniature Hexapod



H-824 Compact Six-Axis Hexapod Platform


Six-Axis Parallel Kinematics Microrobot
  • 7 Nanometer Actuator Resolution
  • Arbitrary Center of Rotation
  • Vacuum Option
  • Load Capacity 10 kg
  • Motorized Positioning Range to 45mm (linear), 25° (rotation)
  • 300 Nanometer Min. Incremental Motion ±0.5 Micron Reproducibility
  • Self Locking to 10 kg
  • Sophisticated Controller Using Vector Algorithms

This hexapod platform combines compact dimensions with high accuracy and load capacity. A vacuum version is available.

PDF Brochure | Specifications, Drawings, Answers to Technical Questions




H-850 High Load Hexapod Platform

  • Up to 250kg Load Capacity
  • Actuator Resolution to 0.005 Microns
  • Arbitrary Center of Rotation (Pivot Point)
  • Works in Any Orientation
  • No Moving Cables = Higher Reliability & Precision
  • Heavy-Duty, Ultra-High-Resolution Bearings for 24/7 Applications
  • Reproducibility to ±1 Micron
  • Smaller & Stiffer Package than Conventional Multi-Axis Positioners
  • Vacuum-Option
  • Sophisticated Controller Using Vector Algorithms
  • 20000 h MTBF

The M-850 is the ideal micropositioning system for all complex positioning tasks which depend upon high load capacity and high accuracy in six independent axes. Extremely stiff & accurate components provide an very high natural frequency of 500 Hz with a 10 kg load. As all PI hexapod platforms it allows the user to change the center of rotation (pivot point) anywhere inside or outside the system envelope.

The M-850.50 model can achieve velocities of up to 8mm/second. In contrast, the high-load M-850.11 model provides a vertical load capacity of 250kg (50kg in any orientation).

PDF Brochure | Specifications, Drawings, Answers to Technical Questions
Six Axis Parallel Kinematics Microrobot



H-840 Fast Six-Axis Parallel Kinematics Hexapod Platform


M-840 HexaLight
  • 6 Axis Motion
  • Actuator Resolution to 0.016 Micron
  • Rapid Response
  • Motorized Positioning Ranges to 100mm/ 60°
  • No Moving Cables = Higher Reliability and Precision
  • Self-Locking Option to 30kg Load
  • Fast Direct-Drive Option to 50mm/second
  • Vacuum-Option
  • Arbitrary Center of Rotation (Pivot Point)
  • Sophisticated Controller Using Vector Algorithms
  • 20000 h MTBF

The M-840 is the ideal micro- positioning system for all complex positioning tasks which rely on high accuracy and speed in six independent axes. In addition to positioning all axes, it allows the user to define the center of rotation (pivot point) anywhere inside or outside the system envelope by one simple software command.

PDF Brochure | Specifications, Drawings, Answers to Technical Questions




H-206 6-Axis Precision Hexapod Platform Alignment System / Manipulator

  • Parallel Kinematics with 6 Degrees of Freedom
  • Constant-Length Strut Design w/ Friction-Free Flexure Guides
  • 33 Nanometers Actuator Resolution
  • Reproducibility 0.3 Micron in Space
  • No Moving Cables = Improved Reliability & Reduced Friction
  • Better Dynamics, More Compact than Serial Kinematics Systems
  • For Scanning and Alignment
  • Cartesian Coordinate Control with Virtualized Pivot Point.
  • Powerful Digital Controller with Open Source LabView™ Drivers, DLL Libraries...
  • Integrated Fiber Alignment Routines

This compact Hexapod platform is a highly accurate micro- positioning system for complex multi-axis alignment tasks. It is based on PI"s long experience with ultra-high-resolution, parallel kinematics stages. The use of constant-length struts w/ backlash & friction-free flexure guides (as opposed to variable-length struts) gives the F-206 even higher precision than other hexapod designs.

PDF Brochure | Specifications, Drawings, Answers to Technical Questions

HexAlign

More Multi-Axis Parallel Positioners / SpaceFABs from PI miCos







XY and XYZ Positioning Stages




M-686 XY Precision Positioning Stage with Piezo Linear Motors & Linear Encoders


  • Low Profile Precision XY Positioning Table with large Aperture and Piezo Motor Drive
  • 1"x1" Motorized Range
  • Self Locking Ceramic Linear Motor for Ultra-High Stability
  • Fast: Speed to 100mm/second
  • High Precision Linear Encoders: 0.1 µm Resolution
  • Large Aperture, Low Profile, Small 150x150mm Footprint
  • Compatible with PI Piezo Nanopositioning / Scanning Stages

These XY, open-frame micro- positioning stages are designed for life-science and microscopy applications. If nanometer precision is required, a piezo flexure stage can be mounted on top.

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Precision Positioning Table


OEM Planar XY Micropositioning Scanner System

OEM Planar Scanner
  • XY Precision Positioning Table with High Load Capacity to 66kg
  • Velocity to 10 mm/second
  • 100 Nanometer Resolution Linear Encoder
  • Self-Locking
  • Direct Drive, with Servo or Stepper Motors
  • For Optics and Interferometry applications

Fast XY positioning table with precision guiding system: the M-900KOPS planar scanner was developed for OEM applications / white light interferometetry

PDF Brochure | Specifications, Drawings, Answers to Technical Questions



M-880 3-DOF Planar Precision Micropositioning Positioning Stage


  • XY-Theta-Z Parallel Kinematics Stage with Special Controller
  • 20x20mm x 8° Motorized Positioning Range
  • Handles 150kg Static Load
  • Servo Motors with Integrated Driver
  • Large Aperture



PDF Brochure | Specifications, Drawings, Answers to Technical Questions

3-Axis Planar Precision Positioning System




XY Micropositioning Table for High-Resolution Microscopes

XY Piezo Linear Motor Table
  • Integrated Closed-Loop Ceramic Linear Motors Combine High Speed to 150 mm/secec and Smooth Motion
  • Significantly Higher Stability than Conventional Leadscrew-Driven Stages: Self-Locking at Rest, no Servo Dither
  • Travel Ranges to 225x85mm
  • Integrated Linear Encoders, Sensor Resolution to 0.1 ?m
  • Compact Design, Low Profile, Mounts Directly to Microscope
  • Compatible with Piezo-Z and Piezo XYZ Scanning Stages

PI XY microscope tables are designed for excellent thermal and positional stability. PILine® piezomotor-driven stages excel in precision positioning and automation applications. The low profile height makes integration easy and a choice of mechanically compatible high-resolution PI piezo nanopositioning / scanning stages adds to the versatility.

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M-545 XY Microscope Micropositioning Table: Manual & Motorized


  • Stable Platform for Piezo Nanopositioning Scanning Systems
  • 30mm Profile for Easy Integration:
  • Positioning Range 25mm x 25mm
  • Micrometer-Driven, Motor Option Available
  • For Nikon, Zeiss, Leica and Olympus Microscopes

This XY micro- positioning stage is designed to provide a stable platform for PInano® piezo nanopositioning and scanning stages as well as other PI nanopositioning stages

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Open Frame Microscope Stage




Z-X-Theta-Y Precision Positioning System with Arbitrary Pivot Point

Goniometer Precision Positioner
  • Motorized Positioning Ranges ±25mm (X,Z) ±30°(Theta-Y)
  • Arbitrary Pivot Point
  • 100 Nanometer MIM
  • Servo Motors with integrated Driver
  • Parallel Kinematic Design

This tripod precision positioning table was designed to provide higher flexibility than goniometric cradles.

PDF Brochure | Specifications, Drawings, Answers to Technical Questions



XYZ Stage for Photonics Alignment


  • Precision XYZ Positioning Table for Photonics Alignment Applications
  • 5mm or 15mm Coarse Motorized Positioning Range
  • 100 µm Piezo Range for high speed & Nanometer Resolution
  • Closed-Loop Option When Absolute Position Information is Required
  • Optional Stepper- & Servo Motors

F-130 & F-131 are compact computer-controllable 3-Axis precision positioning / nanopositioning systems for precision alignment application such as fibers / optical components. The coarse positioners provide 50 nanometers resolution, enough to find first light and the piezo fine drives provide 1 nanometer and very fast response for quick scanning. Watch youtube video at http://www.youtube.com/v/mwQlxUDvAgI

PDF Brochure | Specifications, Drawings, Answers to Technical Questions
Compact XYZ Photonics Alignment System




M-044 Tip/Tilt Stage with Piezo Drive Option for Nanometer Precision

  • One- & Two-Axis Tilt Stages
  • Zero Backlash
  • Sub-µrad Resolution
  • Manual and DC-Motor Drives
  • Compatible with Leading Industrial Motion Controllers
  • Optional Piezo Drives for Tracking and Scanning

 

M-044 is a two-axis ( XX, YY) tip/tilt stage for small loads. It is spring preloaded for elimination of backlash and feature resolution and repeatability superior to that of goniometric cradles. Versions with piezo translators allow ultra-high-resolution dynamic scanning and tracking.

PDF Brochure | Specifications, Drawings, Answers to Technical Questions

Tip/Tilt Stages

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N-510 Ultra-High Precision Z/Tip/Tilt Platform for High Loads


High Force Z/Tip/Tilt Platform
  • Precision Alignment in Optics, Astronomy and Semiconductor Applications
  • Self-Locking Piezoceramic Motor Design, Ultra-High Stability, with no Heat Generation
  • Ceramic Drive allows Vacuum Compatible and Non-Magnetic Versions
  • Sub-Nanometer Resolution
  • Compact Tripod Parallel-Kinematic Drive

PDF Brochure | Specifications, Drawings, Answers to Technical Questions

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Mini Positioners
mini positioners
Piezo Positioners
Linear Motors Stages
Precision Actuators Actuators
Multi-Axis Positioners
Hexapods
Vertical and Linear Stages
Linear Stages, Vertical Positioners
Rotation Stages
Rotation Stages

controllers
Motion Controllers

nanopositioning
Nanopositioning