Motorized Precision Positioning: Linear & Rotary Tables, Actuators, Piezomotors, Hexapods, Nanopositioning

All linear and rotary positioners can be arranged to multi-axis combinations and many can be fitted with optional piezo drives with <1 nm resolution.

Our new line of compact Piezo Linear Motors and Linear Slide Systems are the smallest, fastest and most powerful on the market.

Mini Positioners

M-122 Fast Miniature Precision Positioning Stage / Micropositioning Slide with Linear Encoder

• Compact Motorized Precision Positoining Table
• Positioning Range to 25mm
• 0.1 µm Optical Linear Encoder for Very High Accuracy & Reproducibility
• Min. Incremental Motion to 0.2 µm
• Max. Velocity 20mm/second
• Cross-Roll Bearings
• Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes

These high-precision precision positioning linear slides combine small dimensions, very high accuracy and high speed at a competitive price. With their linear encoder and backlash-free ball-screw, these stages can provide much higher accuracy and better reproducibility than stepper motor stages or rotary encoder servo motor stages.

M-110, M-111, M-112 High-Resolution Motorized Precision Positioner: 5, 15 & 25mm

• Compact & High Precision Motorized Positoining Table
• Very Cost Effective
• Min. Incremental Motion to 50 nm
• Max. Velocity 2mm/second
• Closed-Loop Servo Motors or Stepper Motors
• Limit & Home Switches
• Ball Screw Option for High Speeds & Long Lifetimes
• Vacuum-Option to 10^-6 hPa

These ultra-high resolution linear translation stages provide 5, 15 and 25mm positioning range in a very small package. High precision leadscrews with sub-micron resolution and linear ball bearings guarantee better than 0.5 microns straightness.

M-116 Miniature Precision Positioning Rotary Table: Worm Gear Drive & Servo Motor

• Motorized Precision Rotary Positioner
• Combines with M-110, -11, -12 Micropositioning Mini Slides
• Ultra-Compact Design
• Design Resolution: 2.5 microrad
• Clear Aperture
• Fast: to 20 °/second
• Preloaded Anti-Backlash Worm Drive for Excellent Reproducibility
• Precision Home Switch

These miniature precision positioning rotation tables are equipped with low-friction, spring-preloaded worm gear drives and closed-loop servo motors.

Piezo Linear Motor-Driven Stages

• Open-Loop Piezo-Motorized Precision Positionig Table
• Very Fast: Velocity to 500mm/second
• Smallest Linear Translation Stage with Ultrasonic Ceramic Motor
• 20mm Motorized Positioning Range
• 50 Nanometer Resolution
• XY-Combinations Available
• Vacuum Option
• Self Locking Ceramic Linear Motor

These very small ceramic motor-driven micropositioning translation stages provide very fast response (millisecond scale) and can accelerate rapidly to 500mm/second.

M-663 Sub-Miniature Piezo-Motorized Linear Precision Positioning Table

• Extremely Compact Closed-Loop Micropositioning Stage with Linear Encoder and Linear Piezo Motor
• Precise: 0.1 Micron Linear Encoder
• Fast: to 400mm/second and 10 g Acceleration
• Ceramic Motor with AutoLock
• XY Table Combinations
• Vacuum Option
• 19mm Motorized Positioning Range
• Self Locking Ceramic Linear Motor for Ultra-High Stability

The M-663 high-precision linear positioning table for micro-positioning applications is driven by an ultrasonic ceramic motor. It provides acceleration to 10g's and velocity to 400mm/second and autolocking feature for excellent in position stability, all unique features for a positioner that small.

M-664 Miniature Micro-Positioning Linear Slide with Closed-Loop Piezo Linear Motor

• Fast Precision Positioning Table: to 400mm/second and 10 g Acceleration
• 1" Motorized Positioning Range
• Ultra-Low Profile: 15mm
• Precise: 0.1 Micron Linear Encoder
• Crossed Roller Bearings for Extra High Guiding Accuracy
• Compact XY Table Combinations
• Self Locking Ceramic Linear Motor for Ultra-High Stability

These high-precision micro- positioning linear positioning systems are driven by an ultrasonic ceramic motor. It provides acceleration to 10g's and velocity to 400mm/second and autolocking feature for excellent in position stability, all unique features for a positioner that small. The ultra low profile of 15mm is another advantage.

M-683 Low Profile Micro-Positioning Translation Stage w/Linear Encoder & Ceramic Motor

• Fast Precision Positioning Table with Piezo Motor: 350mm/second
• Compact: 21mm profile height, XY Table Combination Feasilbe
• Precise 0.1 µm Resolution Linear Encoder
• 50mm Motorized Positioning Range
• Crossed Roller Bearings for Excellent Guiding Accuracy
• Ceramic Motor: Non-Magnetic Vacuum-Compatible Working Principle
• Self-Locking at Rest

These compact micro- positioning stages employ the U-164 type PILine® ultrasonic piezo linear motor and a high precision linear encoder. High guiding accuracy is guaranteed by paired crossed-roller bearings. A vacuum option for 10^-6 torr is available. The scalable design allows for positioning ranges to 300mm.

M-686 XY Precision Positioning Stage with Piezo Linear Motors & Linear Encoders

• Low Profile Precision XY Positioning Table with large Aperture and Piezo Motor Drive
• 1"x1" Motorized Range
• Self Locking Ceramic Linear Motor for Ultra-High Stability
• Fast: Speed to 100mm/second
• High Precision Linear Encoders: 0.1 µm Resolution
• Large Aperture, Low Profile, Small 150x150mm Footprint
• Compatible with PI Piezo Nanopositioning / Scanning Stages

These XY, open-frame micro- positioning stages are designed for life-science and microscopy applications. If nanometer precision is required, a piezo flexure stage can be mounted on top.

Vertical & Linear Stages

M-501 Vertical Micro-Positioning System (Z-Stage)

• 1/2" Motorized Positioning Range (12.5mm)
• Closed-Loop Servo Motor with Integrated Driver & Ultra-High-Resolution Encoder
• Backlash-Free Recirculating Ballscrews
• Precision Limit & Home Switches
• >20,000 Hours MTBF

This vertical precision positioning table is designed fit the M-511 / M-521 / M-531 low-profile family of linear precision stages for micro-positioning applications. M-501 vertical stages feature a precision-machined base of high-stability, stress-relieved aluminum. Precision-ground recirculating ballscrews provide maintenance-free and backlash-free positioning.

M-451 High-Load Vertical Precision Positionng Table for Micropositioning Applications

• 1/2" Motorized Positioning Range (12.5mm)
• 12 kg Load Capacity, High Stiffness
• <0.1µm Minimum Incremental Motion (3 Nanometer Encoder Resolution)
• Closed-Loop Servo Motor with Integrated Driver
• Precision Limit & Home Switches
• Compatible with Piezo Flexure Nanopositioning Stages & Scanners
• Self-Locking to 12kg Load at Rest

This high-precision precision micro- positioning table is designed for high-load vertical positioning tasks. It features a precision-machined base of high-stability, stress-relieved aluminum. High precision-cross-roller guided wedges are self locking and low-friction leadscrews provide maintenance-free positioning.

M-714 Hybrid PZT/Servo-Motor Nanopositioning Table for Vertical Precision Positioning Applications

• Hybrid Motor Combines Advantages of Piezoelectrics and Electromagnetic Drives
• 2 Nanometer Linear Encoder Resolution
• High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
• Active Compensation of Stick/Slip During Startup and Settling
• Active Backlash Compensation
• Excellent Velocity Control
• Millisecond Settling to Nanometer Accuracy
• Reliable Execution of Minimal Increments

The M-714 precision positioning table was designed from the ground up to use the hybrid drive technology. The hybrid design overcomes the limitations of conventional precision positioning systems by combining the well-known advantages of piezo-flexure drives (unlimited resolution and very rapid response) with the long Motorized Positioning Ranges and high holding forces of a servo-motor/ballscrew arrangement. The M-714 can position loads up to 10 kg with nanometer precision over 7mm in vertical or horizontal direction. Compared to high-resolution magnetic linear drives, the hybrid principle allows high holding forces with minimum power consumption, without counterbalancing the load. The angular deviation is less than ±10 µrad over the entire Positioning Range of 7mm.

M-311 - M-318 Sub-Miniature Micropositioning Linear Table

• Sub-Miniature Precision Positioning Slides
• Stainless-Steel & Linear Ball Bearings
• X, XY and XYZ Versions
• PiezoMike Option for Nanometer Resolution
• Clear Aperture

The M-310 series of miniature precision positioning tables are our smallest micrometer-driven positioners. The carriage is spring preloaded against the micrometer tip for elimination of backlash. M-310 series stages are available in one-, two- or three-axis configurations. The latter consists of a two-axis stage, an angle bracket and a one-axis stage. Please note that an XY unit cannot be separated into two one-axis stages. The vertical stage in the M-313 XYZ assembly supports the load through the micrometer spindle (not the preload springs) providing excellent stability.

M-011 Ultra-High-Precision, Side-Drive Linear Table with Magnetic-Kinematic Bearings

• Compact and Highly Accurate Precision Positioning Table for Small Loads
• Magnetically Coupled Kinematic Bearings for Excellent Straightness/Flatness ≤0.2 Microns
• Compact Side Drive, 15mm Positioning Range
• PZT Option for Scanning and Tracking Applications
• 0.1 Micron Resolution with Closed-Loop Servo Motor
• 5 Nanometer Resolution with Closed-Loop Piezo Actuator

The M-011 precision positioning stage is designed for applications where Straightness/Flatness of motion needs to be better than 0.2 Microns. This is achieved with magnetically preloaded kinematic bearings. Servo motor options and piezo options are available.

M-014 Ultra-High-Precision, Side-Drive Linear Table with Magnetic-Kinematic Bearings

• Compact and Highly Accurate Precision Positioning Table for Small Loads
• 30mm Ø Aperture, 25mm Positoning Range, Compact Side Drive
• Magnetically Coupled Kinematic Bearings for Excellent Straightness/Flatness ≤0.3 Microns
• PZT Option for Scanning and Tracking Applications
• 0.1 Micron Resolution with Closed-Loop Servo Motor
• 5 Nanometer Resolution with Closed-Loop Piezo Actuator

This precision positioning table is designed for applications where Straightness/Flatness of motion needs to be better than 0.2 Microns. This is achieved with magnetically preloaded kinematic bearings. Servo motor options and piezo options are available.

M-126 High Precision Micropositioning Stage with Crossed Roller Bearings: 1" Travel

• Compact Precision Positioning Table with High Precision Crossed Roller Bearings
• 25mm Motorized Positioning Range
• 5 Motorized Versions + Manual
• Better than 100 Nanometer Resolution
• Multi-Axis Combinations
• Limit & Home Switches with Direction-Sensing

The M-126 precision micro- positioning system is available with precision leadscrew and ballscrew drives for resolution to 100 nanometers and below with excellent reproducibility. Precision crossed roller bearings provide 2 µm straightness of travel and better.

5 closed-loop servo motor and stepper motor versions are available.

M-403/4 M-413/4 Cost-Effective Industrial Precision Positioning Tabble / Micropositioning Slide

• Modular Positoning System, 4 Families, Many Options, Stepper and Servo Motor Drives
• Precision Leadscrews or Ball Screws
• 25 to 300mm Motorized Positioning Ranges
• Stress-Relieved 80mm or 120mm Al Base
• High Resolution to 0.02 µm

The M-403 / M-404 and M-414 / M-414 precision positioning stage families are low cost, yet high precision translation stages for loads up to 50 kg over Motorized Positioning Ranges to 300mm. They are designed with high-value components and feature a precision-machined, high-density, stress-relieved aluminum base for exceptional stability with minimum weight.

M-400 Series Ultra-Precision Micropositioning Stages with Crossed Roller Bearings

• High Precision Positioning Table featuring Special Low-Friction Leadscrews for Very High Resolution & Reproducibility
• 50, 100 and 150mm Motorized Positioning Range
• Crossed Roller Bearings & Stress-Relieved Aluminum Stage Base for Highest Stability
• Servo & Stepper-Motor Options + Manual
• Manual Knob for Convenient Pre-Positioning
• Limit & Home Switches with Direction-Sensing

These ultra-high resolution leadscrew-driven precision positioning stages are available with positioning ranges of 50mm, 100mm and 150mm. High precision cross-roller bearings guarantee 2 µm/100mm straightness of travel. The stage base is precision machined from high-density, stress-relieved aluminum for exceptional stability and minimum weight.

M-605 Compact, High-Accuracy Micropositioning Slide with Linear Encoder & Bellows

• High Precision Positioning Table featuring Linear-Scale Encoder for Highest Accuracy
• 1" and 2" Motorized Positioning Ranges, Ultra-Compact Design
• Dust Protection
• Velocity up to 50mm/second.
• Closed-Loop Servo Motor with Integrated Driver
• Limit & Home Switches with Direction-Sensing
• 20 kg Load Capacity
• >20,000 Hours MTBF

These precision positioning translation stages are designed to meet the most demanding positioning requirements in applications where space is limited. Bellows protect the ball screw and linear encoder from dusty.

M-505 Ballscrew-Driven Low Profile Micropositioning Table

• High Precision Positioning Table Driven by Backlash-Free Precision Ballscrews
• Fast: Velocity up to 50mm/second.
• Motorized Positioning Range to 150mm (6 inches)
• Closed-Loop Servo Motor with Integrated Driver
• Stress-Relieved Aluminum Stage Base for Highest Stability
• Limit & Home Switches with Direction-Sensing
• High Load Capacity
• > 20,000 Hours MTBF

These high-load, low-profile motorized precision positioning tables feature a precision-machined base of high-density, stress-relieved aluminum for exceptional stability and minimum weight. Precision-ground (better accuracy than rolled) ballscrews provide, backlash-free, low-friction and maintenance-free service.

M-500 High-Load Precision Micropositioning Linear Table with Ballscrew Drive

• High Load Precision Positioning Table Driven by Backlash-Free Precision Ballscrews
• High Load Capacity 100 kg
• 4", 8" and 12" Motorized Positioning Range (102, 204 and 306mm)
• Fast: To 125mm/second
• Closed-Loop Servo Motor with Integrated Driver
• Linear Encoders Option for Highest Accuracy
• Backlash-Free Ballscrews
• Limit & Home Switches with Direction-Sensing
• >20000 Hours MTBF

M-500-series micro- positioning precision linear tables meet the most demanding positioning requirements. Despite a stiff basis with very high load capacity they are compact and light-weight an advantage when building multiaxis combinations.

M-511.HD Ultra-Precision Positioning Hybrid Piezo / Servo Motor Stage

• Ultra-High Precision Positioning Table Combines Advantages of Piezo & Servomotor
• Millisecond Settling to Nanometer Accuracy
• 2 Nanometer Linear Encoder
• 100mm Motorized Positioning Range with up to 50mm/second
• Active Stick/Slip & Backlash Compensation
• Excellent Velocity Control
• Reliable Execution of Minimal Increments
• High Drive and Holding Forces with Minimal Power

These unique hybrid motorized nanopositioning tables overcome the limitations of conventional precision positioning systems by combining the well-known advantages of piezo-flexure-drives (unlimited resolution and very rapid response) with the high pushing and holding forces and long Positioning Range of a servo-motor/ballscrew arrangement. The M-511.HD allows velocities to 50mm/second with 2 nm resolution and can handle loads of 50 kg for horizontal operation.

V-106 QuickScan Voice-Coil High-Dynamics Precision Scanning System

Piezo Motor Actuators

N900 Non-Magnetic Linear Actuator for Precision Applications in High Magnetic Fields

• 5 N Force
• 70mm Motorized Positioning Range
• PiezoWalk Linear Motor Principle
• Self-Aligning &
• Self Locking
• Made from non-magnetic materials

N-310 Compact High-Precision PiezoWalk® Stepping Motor Actuator

• Push/Pull Force: 10N
• 125mm Piezo-Motorized Positioning Range
• Compact and Cost-Effective Design
• Sub-Nanometer Resolution
• Low Operating Voltage
• Self Locking, with no Heat Dissipation, Nanometer Stability
• Non-Magnetic and Vacuum-Compatible Working Principle

These miniature linear actuators are driven by the PI's patented PiezoWalk® ceramic motor drives and provide positioning ranges from 10mm to 125mm in a very compact package 1x1x0.5". Depending on the sophistication of the driver electronics they provide precision in the sub-micrometer / or sub-nanometer range.

N-381 NEXACT® Micro-Manipulator / Nano-Manipulator, Piezo Stepper

• Dual-Mode Piezo Stepping Drive designed for Micro- and Nano-Manipulation
• 30mm Positioning Range, Smooth Motion up to 10mm/second
• High Force Generation, Very Fast Acceleration, e.g. for Cell Penetration
• 20 nm Linear Encoder Option / or Open-Loop Operation
• Self Locking at Rest, no Heat, no Jitter
• Vacuum & Nonmagnetic Options

These PiezoWalk linear-motor driven actuators have all the ingredients for micro-and nano-manipulation such as required in neuroscience, biotechnology and nanotechnology. Very smooth motion, high-dynamics with rapid acceleration, sub-nanometer resolution and high long-distance velocity of 10mm/second. The dual mode drive provides long travel walking motion and a continuous "analog mode" with piezo-class resolution and response over 7 microns. This mode can be used for rapid acceleration such as required in cell penetration applications, or smooth motion for dynamic laser tuning and also for dynamic damping of oscillations.

U-264 RodDrive Piezomotor Direct Drive Compact Linear Actuator with Ultrasonic High Speed Motor

• 150mm Positioning Range
• High Speed to to 250mm/second
• Self-Locking
• Holding / Pushing Force to 15N
• Non Magnetic Versions Feasible

These ultrasonic precision drives can replace classic actuators and drive elements such as motor / leadscrew assemblies or magnetic linear drives, when compact size and high velocity are required.

M-272 Fast Micropositioning Linear Piezo-Motor Actuator for Automation

• Fast: up to 200mm/second
• Stable: Self Locking at Rest
• Easy to Integrate: Complete with Linear Encoder & Guiding System

M-272 ultrasonic-motor driven micro- positioning actuators provide a cost-effective alternative to motor-leadsrew combinations and electromagnetic linear motors when small dimensions and/or high velocity are of the essence. The ceramic motors are self-locking, with no heat generation at rest.

Servo- and Stepper Motor Actuators

M-228 - M-229 Low-Cost Precision Stepper-Motor Actuators

• Cost-Efficient Design
• 10mm / 25mm Motorized Positioning Range
• 46 nanometers Resolution (with C-663 Controller)
• To 80 N Push Force
• Non-Rotating Tip
• Direct Drive for high Speed to 5mm/second
• Limit and Home Switches

These low-cost micro- positioning actuators are equipped with high-resolution direct drive and gear-head stepper motors. The stepper mikes can push or pull loads up to 80 N, and provide speeds up to 5mm/second.

M-230 Ultra-High Precision Micropositioning Actuator Servo & Stepper Motor

• 50 Nanometer Minimum Incremental Motion
• Velocity to 2mm/second, Non-Rotating Tip
• Closed-Loop Servo Motors or Stepper Motors
• Limit and Home Switches
• Front Mount or Clamp Mount
• 10mm & 25mm Motorized Positioning Range
• >5,000 Hours MTBF

These ultra-high-resolution micro - positioning actuators come with closed-loop servo motors or stepper motors.

M-231 Compact High-Precision Micropositioning Actuator: 17mm Travel

• 100 Nanometers Minimum Incremental Motion
• 17mm Motorized Positioning Range
• Velocity up to 2.5mm/second.
• Closed-Loop Servo Motor
• Home & Limit Switches
• Compatible with M-105 Stages & F-110 Fiber Optic Aligners
• >5,000 Hours MTBF

The M-231 is an ultra-high-resolution linear actuator providing linear motion up to 17mm with sub-micron resolution in a compact package. It consists of a leadscrew driven by a closed-loop Servo motor/gearhead combination with motor-shaft-mounted, high-resolution encoder (2048 counts/rev.).

M-232 Folded, High-Precision, Closed-Loop Micropositioning Actuator: 17mm

• 17mm Motorized Motorized Positioning Range
• 0.1 Micron Minimum Incremental Motion
• Velocity up to 2.5mm/second.
• Closed-Loop Servo Motor
• Compatible with Leading Industrial Motion Controllers
• Home & Limit Switches
• Fits M-105 & F-110 Fiber Aligners
• >5,000 Hours MTBF

This precision micro- positioning actuator features a space-saving design with a leadscrew side-by-side to a closed-loop Servo motor.

M-235 High Force / High Precision Micropositioning Actuator: 20mm and 50mm

• 120 N Push/Pull Force, 100 N Lateral Force Limit
• Vacuum Option
• Motorized Positioning Range to 50mm
• 0.1 µm Minimum Incremental Motion
• High-Speed Direct Drive Option
• Preloaded Ultra-Low-Friction Ball Screw with Non-Rotating Tip
• Closed-Loop Servo Motors and Stepper Motors
• Home & Limit Switches
• >20,000 Hours MTBF

These high force, ultra-high-resolution micro- positioning linear actuators provide linear motion of up 20mm and 50mm, resp. with sub-micron resolution. The integrated low-friction ballscrew is driven by a closed-loop servo motor or a stepper motor.

M-238 High Force, High Precision Micropositioning Actuator with Linear Encoder: 400N, 50mm

• 400N Force, 50mm Motorized Positioning Range, 30mm/second
• 0.1 µm Linear Encoder Option for Ultra-High Accuracy
• Home & Limit Switches
• Preloaded Zero-Backlash Ball Screw
• MTBF > 20.000 h
• Vacuum Option

The M-238 is a high-force micropositioning linear actuator. It provides linear motion up to 50mm, a load capacity to 400 N and high velocity to 30mm/second. Its low-friction, ballscrew, is driven by a closed-loop servo motor with integrated power amplifier. For applications with the highest precision requirements, an integrated linear encoder is available.

PiezoMike: Piezoelectric Micrometer Drive

• Sub-Nanometer Resolution
• Alternative for Standard Micrometers
• Manual Positioning Range to 18mm
• High-Resolution Piezo Motion to 25 Micron
• Dynamic Operation to 10 Hz

P-853/P-854 PiezoMikes feature a flexure guided piezo actuator combined with a manual micrometer. Sensitivity of the micrometer is 1 µm. By controlling the piezo voltage, the micrometer tip is automatically moved in and out (up to 25 µm) relative to the manually set position. Resolution of the piezoelectric motion is in the sub-nanometer range.

M-227 High-Resolution Micropositioning Actuators with Servo Motors

• Very Compact
• Motorized Positioning Ranges 10mm, 25mm, 50mm
• 50 Nanometer Minimum Incremental Motion
• Closed-Loop Servo Motor and Non-Rotating Tip
• Piezo Option for Sub-Nanometer Resolution
• >5,000 Hours MTBF

M-272 ultrasonic-motor driven micro- positioning actuators provide a cost-effective alternative to motor-leadsrew combinations and electromagnetic linear motors when small dimensions and/or high velocity are of the essence. The ceramic motors are self-locking, with no heat generation at rest.

M-168 High-Resolution Stepper-Mike Actuators

• 10, 25 & 50mm Motorized Positioning Ranges
• Resolution <0.1 Microns, 5mm/second
• 2-Phase Stepper Motor Direct Drive
• Convenient Prepositioning with Manual Knob
• Piezo Option for Sub-Nanometer Resolution

These precision stepper-motor driven micro- positioning actuators provide motion to 50mm with 0.1 micron resolution. The 2-phase stepper motor direct drive provides velocity to 5mm/second.

Rotation Stages

M-660 Fast Rotary Table. Ultra-Low Profile Micropositioner

• Precision Rotary Table with Unlimited Motorized Positioning Range
• Low Profile: Only 14mm in Height
• Max. Velocity 720 °/s
• Low Profile: Only 14mm in Height
• Self-Locking Ceramic Direct Drive: Energy Saving & High Position Stability
• Direct Metrology Linear Encoder, 34 µrad Resolution PILine® Direct Drive: Non-Magnetic and Vacuum- Compatible Working Principle
• Compact Combinations with Linear Stages

The M-660 precision rotary stage employs PILine® ultrasonic piezo ceramic motors that act on a ceramic drive ring attached to the platform. This direct drive principle allows for the compact design and low profile of the rotary stage. An integrated incremental encoder offers precision position control with up to 4 µrad resolution. The integrated U-164 PILine® linear motors provide a maximum torque of 0.3 Nm, independent from the direction of motion, and a maximum velocity of up to 720 °/second. The maximum load is 2 kg.

M-060/1/2 High Performance Rotary Table Family with Worm Gear Drive

• Precision Motorized Rotary Table with Worm Gear
• Unlimited Motorized Positioning Range, speed up to 90 deg/second
• Ultra-High Resolution
• Preloaded Worm Drive for Zero Backlash
• Choice of Drive: Servo motor with integrated Driver, Stepper-Motor and Manual
• Direction - Sensing Home Switch

M-06x series high precision rotary stages are equipped with ultra-low-friction, spring-preloaded worm gear drives allowing unlimited rotation in either direction. Models M-060 feature a 60mm diameter turntable, models M-061, a 100mm table and models M-062, a 120mm table.

M-116 Mini Rotary Table for Micropositioning, with Worm Gear Drive

• Smallest Rotary Table in the PI Product Range
• Compatible with M110, M111 & M112 Mini Linear Positioning Stage Series
• Unlimited Motorized Positioning Range, Speed to 20 degrees/second
• 2.5 Micro-Radian Design Resolution, 10 Microrad Micro-Radian Reproducibility
• Clear Aperture
• Preloaded Anti-Backlash Worm Drive
• Precision Home Switch

M-116 rotary stages are equipped with low-friction, spring-preloaded worm gear drives allowing unlimited rotation in either direction in an extremely compact package.

M-035 Small Precision Tangent-Arm Rotary Stage with Piezo & Servo Motor Option

• Compact Precision Rotation Table featureing Sub-Microradian Resolution
• 360 Deg Coarse Rotation Range, up to 19 Deg Fine Rotation Range with <1 microradian Resolution
• Precision Micrometer or Servo Motor Drives
• Piezo Option for High-Resolution Scanning and Tracking
• Ø 20mm Clear Aperture

M-035 series precision positioning rotation stages with tangent-arm drive feature high resolution, excellent reproducibility and minimum wobble. The stages are equipped with double-row ball bearings for zero backlash and high load capacity. Both the rotation platform and the scale ring (graduated in 2-degree increments) can be independently coarse posi-tioned over 360° degrees and then locked with screws.

• Precision Rotation Table featureing Sub-Microradian Resolution
• 360 Degrees of Coarse Rotation Range, up to 21 Degrees Fine Rotation Range
• Precision Micrometer or Servo Motor Drives
• Piezo Option for High-Resolution Scanning and Tracking
• Ø 30mm Clear Aperture

M-036 series precision rotation stages with tangent-arm drive feature high resolution, excellent reproducibility and minimum wobble. The stages are equipped with double-row ball bearings for zero backlash and high load capacity. Both the rotation platform and the scale ring (graduated in 2-degree increments) can be independently coarse positioned over 360° degrees and then locked with screws.

6-Axis Hexapods & Multi-Axis Stages

M-810 6-Axis Mini Motorized Hexapod Platform

• Most-Compact Precision Hexapod Platform
• Actuator Resolution 40 nanometers
• Motorized Positioning Ranges 40x40x13mm, Rotation to 60 Degrees
• Load Capacity to 5 kg
• Min. Incremental Motion to 200 nm Reproducibility to ±0.5 Microns
• Velocity to 10mm/second
• Vacuum Option
• Sophisticated Controller Using Vector Algorithms

This miniaturized precision hexapod platform is currently PI's smallest standard 6-axis micropositioning system to date (smaller custom systems are available). As all PI hexapod platforms it allows the user to change the center of rotation (pivot point) anywhere inside or outside the system envelope.

M-811 Vacuum-Compatible Miniature Hexapod 6-Axis Positioner; High Precision and Very Versatile

• Vacuum-Compatible Miniature Hexapod
• Complete with Specialized Hexapod Controller and Software
• Travel Ranges 34 x 32 x 13 mm, Rotation to 42 Degrees
• Load Capacity to 5 kg
• Actuator Resolution 40 nm
• Min. Incremental Motion to 200 nm
• Repeatability up to ±0.2 µm
• Velocity to 10 mm/sec

M-824 Compact Six-Axis Hexapod Platform

• 7 Nanometer Actuator Resolution
• Arbitrary Center of Rotation
• Vacuum Option
• Load Capacity 10 kg
• Motorized Positioning Range to 45mm (linear), 25° (rotation)
• 300 Nanometer Min. Incremental Motion ±0.5 Micron Reproducibility
• Self Locking to 10 kg
• Sophisticated Controller Using Vector Algorithms

This hexapod platform combines compact dimensions with high accuracy and load capacity. A vacuum version is available.

M-850 High Load Hexapod Platform

• Up to 250kg Load Capacity
• Actuator Resolution to 0.005 Microns
• Arbitrary Center of Rotation (Pivot Point)
• Works in Any Orientation
• No Moving Cables = Higher Reliability & Precision
• Heavy-Duty, Ultra-High-Resolution Bearings for 24/7 Applications
• Reproducibility to ±1 Micron
• Smaller & Stiffer Package than Conventional Multi-Axis Positioners
• Vacuum-Option
• Sophisticated Controller Using Vector Algorithms
• 20000 h MTBF

The M-850 is the ideal micropositioning system for all complex positioning tasks which depend upon high load capacity and high accuracy in six independent axes. Extremely stiff & accurate components provide an very high natural frequency of 500 Hz with a 10 kg load. As all PI hexapod platforms it allows the user to change the center of rotation (pivot point) anywhere inside or outside the system envelope.

The M-850.50 model can achieve velocities of up to 8mm/second. In contrast, the high-load M-850.11 model provides a vertical load capacity of 250kg (50kg in any orientation).

M-840 Fast Six-Axis Parallel Kinematics Hexapod Platform

• 6 Axis Motion
• Actuator Resolution to 0.016 Micron
• Rapid Response
• Motorized Positioning Ranges to 100mm/ 60°
• No Moving Cables = Higher Reliability and Precision
• Self-Locking Option to 30kg Load
• Fast Direct-Drive Option to 50mm/second
• Vacuum-Option
• Arbitrary Center of Rotation (Pivot Point)
• Sophisticated Controller Using Vector Algorithms
• 20000 h MTBF

The M-840 is the ideal micro- positioning system for all complex positioning tasks which rely on high accuracy and speed in six independent axes. In addition to positioning all axes, it allows the user to define the center of rotation (pivot point) anywhere inside or outside the system envelope by one simple software command.

• Parallel Kinematics with 6 Degrees of Freedom
• Constant-Length Strut Design w/ Friction-Free Flexure Guides
• 33 Nanometers Actuator Resolution
• Reproducibility 0.3 Micron in Space
• No Moving Cables = Improved Reliability & Reduced Friction
• Better Dynamics, More Compact than Serial Kinematics Systems
• For Scanning and Alignment
• Cartesian Coordinate Control with Virtualized Pivot Point.
• Powerful Digital Controller with Open Source LabView™ Drivers, DLL Libraries...
• Integrated Fiber Alignment Routines

This compact Hexapod platform is a highly accurate micro- positioning system for complex multi-axis alignment tasks. It is based on PI"s long experience with ultra-high-resolution, parallel kinematics stages. The use of constant-length struts w/ backlash & friction-free flexure guides (as opposed to variable-length struts) gives the F-206 even higher precision than other hexapod designs.

Multi-Axis Tables

XY Micropositioning Table for High-Resolution Microscopes

• Integrated Closed-Loop Ceramic Linear Motors Combine High Speed to 150 mm/secec and Smooth Motion
• Significantly Higher Stability than Conventional Leadscrew-Driven Stages: Self-Locking at Rest, no Servo Dither
• Travel Ranges to 225x85mm
• Integrated Linear Encoders, Sensor Resolution to 0.1 ?m
• Compact Design, Low Profile, Mounts Directly to Microscope
• Compatible with Piezo-Z and Piezo XYZ Scanning Stages

PI XY microscope tables are designed for excellent thermal and positional stability. PILine® piezomotor-driven stages excel in precision positioning and automation applications. The low profile height makes integration easy and a choice of mechanically compatible high-resolution PI piezo nanopositioning / scanning stages adds to the versatility.

M-545 XY Microscope Micropositioning Table: Manual & Motorized

• Stable Platform for Piezo Nanopositioning Scanning Systems
• 30mm Profile for Easy Integration:
• Positioning Range 25mm x 25mm
• Micrometer-Driven, Motor Option Available
• For Nikon, Zeiss, Leica and Olympus Microscopes

This XY micro- positioning stage is designed to provide a stable platform for PInano® piezo nanopositioning and scanning stages as well as other PI nanopositioning stages

OEM Planar XY Micropositioning Scanner System

• XY Precision Positioning Table with High Load Capacity to 66kg
• Velocity to 10 mm/second
• 100 Nanometer Resolution Linear Encoder
• Self-Locking
• Direct Drive, with Servo or Stepper Motors
• For Optics and Interferometry applications

Fast XY positioning table with precision guiding system: the M-900KOPS planar scanner was developed for OEM applications / white light interferometetry

• XY-Theta-Z Parallel Kinematics Stage with Special Controller
• 20x20mm x 8° Motorized Positioning Range
• Handles 150kg Static Load
• Servo Motors with Integrated Driver
• Large Aperture

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Z-X-Theta-Y Precision Positioning System with Arbitrary Pivot Point

• Motorized Positioning Ranges ±25mm (X,Z) ±30°(Theta-Y)
• Arbitrary Pivot Point
• 100 Nanometer MIM
• Servo Motors with integrated Driver
• Parallel Kinematic Design

This tripod precision positioning table was designed to provide higher flexibility than goniometric cradles.

Coarse/Fine XYZ Photonics Alignment System

• Precision XYZ Positioning Table for Photonics Alignment Applications
• 5mm or 15mm Coarse Motorized Positioning Range
• 100 µm Piezo Range for high speed & Nanometer Resolution
• Closed-Loop Option When Absolute Position Information is Required
• Optional Stepper- & Servo Motors

F-130 & F-131 are compact computer-controllable 3-Axis precision positioning / nanopositioning systems for precision alignment application such as fibers / optical components. The coarse positioners provide 50 nanometers resolution, enough to find first light and the piezo fine drives provide 1 nanometer and very fast response for quick scanning. Watch youtube video at http://www.youtube.com/v/mwQlxUDvAgI

Small Crossed-Roller Guided Linear Tables with Piezo Option XY and XYZ Assemblies

• XY & XYZ Precision Linear Table Assemblies
• 18 mm Positioning Range
• Robust Stainless-Steel Design
• PiezoMike Option provides 10 Nanometer Resolution
• Servo & Stepper Motor Options with 0.1 Micron Resolution

M-105 and M-106 linear slides are spring-preloaded, cross-roller bearing guided stages available in 1, 2 & 3 -axis configurations. Motor-Mike upgrades and piezo options are available for ultra-precise positioning tasks.

M-044 Tip/Tilt Stage with Piezo Drive Option for Nanometer Precision

• One- & Two-Axis Tilt Stages
• Zero Backlash
• Sub-µrad Resolution
• Manual and DC-Motor Drives
• Compatible with Leading Industrial Motion Controllers
• Optional Piezo Drives for Tracking and Scanning

N-510 Ultra-High Precision Z/Tip/Tilt Platform for High Loads

• Precision Alignment in Optics, Astronomy and Semiconductor Applications
• Self-Locking Piezoceramic Motor Design, Ultra-High Stability, with no Heat Generation
• Ceramic Drive allows Vacuum Compatible and Non-Magnetic Versions
• Sub-Nanometer Resolution
• Compact Tripod Parallel-Kinematic Drive

M-500 Series High-Load Precision Micropositioning Linear Stages with Ballscrew Drives

• XY-Table Combinations and XYZ Combinations
• 4", 8" and 12" Motorized Positioning Range (102, 204 and 306mm)
• Fast: To 125mm/second
• Closed-Loop Servo Motor with Integrated Driver
• Linear Encoders Option for Highest Accuracy
• Backlash-Free Ballscrews
• Limit & Home Switches with Direction-Sensing
• High Load Capacity 100 kg
• >20000 Hours MTBF

M-500-series high accuracy linear positioning table can be combined to XY-Tables and XYZ Tables. They meet the most demanding precision positioning requirements.