Precision Motorized Positioning Stage Manufacturer ľ Motorized Micropositioning Systems


Motorized Precision Positioning Linear Stage / Systems


Linear and vertical motorized postioning stages from PI and PI miCos are designed for precision motion contro applications from photonics alignment to medical design and semiconductor related test and manufacturing processes. In addition to standard positioners, high vacuum compatible stages are available.

Piezo driven linear slides are smaller and faster than most conventional motorized stages.

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Linear, Rotary, Multi-Axis
Positioners



Vertical & Linear Stages




M-501 Vertical Micro-Positioning System (Z-Stage)


M-501 Vertical  Micro positioning Stage
M-531 Positioning Table
XYZ combination of M-521.DD (204 mm),
M-511.DD (102 mm) and M-501.1PD vertical stage
  • 1/2" Positioning Range (12.5mm)
  • Closed-Loop Servo Motor with Integrated Driver & Ultra-High-Resolution Encoder
  • Backlash-Free Recirculating Ballscrews
  • Limit & Home Switches
  • >20,000 Hours MTBF
  • More Elevation Stages
    Vertical Stage Brochure from PI miCos

This vertical precision positioning table is designed fit the M-511 / M-521 / M-531 low-profile family of linear stages for micro-positioning applications. M-501 vertical stages feature a precision-machined base of high-stability, stress-relieved aluminum. Precision-ground recirculating ballscrews provide maintenance-free and backlash-free positioning.

PDF Brochure | Specifications, Drawings, Answers to Technical Questions



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M-451 High-Load Vertical Positionng Table for Micropositioning Applications

  • 1/2" Positioning Range (12.5mm)
  • 12 kg Load Capacity, High Stiffness
  • <0.1Ám Minimum Incremental Motion (3 Nanometer Encoder Resolution)
  • Closed-Loop Servo Motor with Integrated Driver
  • Limit & Home Switches
  • Compatible with Piezo Flexure Nanopositioning Stages & Scanners
  • Self-Locking to 12kg Load at Rest

This micro-positioning table is designed for high-load vertical positioning tasks. It features a precision-machined base of high-stability, stress-relieved aluminum. High accuracy-cross-roller guided wedges are self locking and low-friction leadscrews provide maintenance-free positioning.

PDF Brochure | Specifications, Drawings, Answers to Technical Questions

High Load Vertical Micropositioning Stage
Multiaxis Piezo Positioning Table
P-562.3CD PIMarsÖ XYZ piezo-nanopositioning
& scanning table (200 Ám x 200 Ám x 200 Ám)
mounted on an M-451.1PD elevation table

More Elevation Stages
Vertical Stage Brochure from PI miCos




M-714 Hybrid PZT/Servo-Motor Nanopositioning Table for Vertical Positioning Applications


M-714 Hybrid Piezo and Servo Nanopositioning Z-Stage
  • Hybrid Motor Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 2 Nanometer Linear Encoder Resolution
  • High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments

The M-714 precision positioning table was designed from the ground up to use the hybrid drive technology. The hybrid design overcomes the limitations of conventional positioning systems by combining the well-known advantages of piezo-flexure drives (unlimited resolution and very rapid response) with the long Motorized Positioning Ranges and high holding forces of a servo-motor/ballscrew arrangement. The M-714 can position loads up to 10 kg with nanometer precision over 7mm in vertical or horizontal direction. Compared to high-resolution magnetic linear drives, the hybrid principle allows high holding forces with minimum power consumption, without counterbalancing the load. The angular deviation is less than ▒10 Árad over the entire Positioning Range of 7mm.

PDF Brochure | Specifications, Drawings, Answers to Technical Questions




More Vertical / Elevation Stages from PI miCos




Linear Translation Stages




M-683 Low Profile Piezo Motor Liner Stage w/Linear Encoder

Piezo   Positioner Compact Closed-Loop Translation Stage
  • Fast Linear Positioner wiht Ultrasonic Motor: Velecity to 350 mm/s
  • XY Combinations
  • 100 nm Resolution, Optical Linear Encoder
  • 2" Positioning Range
  • Crossed Roller Bearings improve Guiding Precision
  • Self-Clampint Linear Ceramic Motor

These compact linear stages are equipped with an ultrasonic piezo linear motor and a high resolution linear encoder. Crossed-roller bearings provide high guiding precision. A vacuum option for 10-6 torr is available.

PDF Brochure | Specifications, Drawings, Answers to Technical Questions




M-686 XY Precision Positioning Stage with Piezo Linear Motors & Linear Encoders


  • Low Profile XY Positioning Table with large Aperture and Piezo Motor Drive
  • 1"x1" Motorized Range
  • Self Locking Ceramic Linear Motor for Ultra-High Stability
  • Fast: Speed to 100mm/second
  • High Accuracy Linear Encoders: 0.1 Ám Resolution
  • Large Aperture, Low Profile, Small 150x150mm Footprint
  • Compatible with PI Piezo Nanopositioning / Scanning Stages

These XY, open-frame micro- positioning stages are designed for life-science and microscopy applications. If nanometer precision is required, a piezo flexure stage can be mounted on top.

PDF Brochure | Specifications, Drawings, Answers to Technical Questions
 XY Positioning Table


M-126 High Resolution Positioning Table with Crossed Roller Bearings: 1" Travel


Positioning Translation Stages with Crossed Roller Bearings
  • Compact Positioning Table with High Precision Crossed Roller Bearings
  • 25mm Positioning Range
  • 5 Motorized Versions + Manual
  • Better than 100 Nanometer Resolution
  • Multi-Axis Combinations
  • Limit & Home Switches with Direction-Sensing

The M-126 micro- positioning system is available with precision leadscrew and ballscrew drives for resolution to 100 nanometers and below with excellent reproducibility. Crossed roller bearings provide 2 Ám straightness of travel and better.

5 closed-loop servo motor and stepper motor versions are available.

PDF Brochure | Specifications, Drawings, Answers to Technical Questions



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M-403/4 M-413/4 Cost-Effective Industrial Linear Positioning Tabble / Micropositioning Slide

  • Modular Positoning System, 4 Families, Many Options, Stepper and Servo Motor Drives
  • Precision Leadscrews or Ball Screws
  • 25 to 300mm Positioning Ranges
  • Stress-Relieved 80mm or 120mm Al Base
  • High Resolution to 0.02 Ám

The M-403 / M-404 and M-414 / M-414 positioning stage families are low cost, yet high precision translation stages for loads up to 50 kg over Positioning Ranges to 300mm. They are designed with high-value components and feature a precision-machined, high-density, stress-relieved aluminum base for exceptional stability with minimum weight.

PDF Brochure

Specifications, Drawings M-413 / M-414 (higher accuracy version)
Specifications, Drawings M-403 / M-404 (lower cost version)

  High Resolution Linear Stage



M-400 Series High-Resolution Positioning Stages with Crossed Roller Bearings


 Positioning High-Precision Linear Slide
  • Special Low-Friction Leadscrews for Very High Resolution & Reproducibility
  • 50, 100 and 150mm Positioning Range
  • Crossed Roller Bearings & Stress-Relieved Aluminum Stage Base for Highest Stability
  • Servo & Stepper-Motor Options + Manual
  • Manual Knob for Convenient Pre-Positioning
  • Limit & Home Switches with Direction-Sensing

These ultra-high resolution leadscrew-driven positioning stages are available with positioning ranges of 50mm, 100mm and 150mm. High stiffness cross-roller bearings guarantee 2 Ám/100mm straightness of travel. The stage base is precision machined from high-density, stress-relieved aluminum for exceptional stability and minimum weight.

PDF Brochure | Specifications, Drawings, Answers to Technical Questions



M-605 Compact, High-Accuracy Linear Positioning Slide with Linear Encoder & Bellows

  • High Precision Positioning Table featuring Linear-Scale Encoder for Highest Accuracy
  • 1" and 2" Positioning Ranges, Ultra-Compact Design
  • Dust Protection
  • Velocity up to 50mm/second.
  • Closed-Loop Servo Motor with Integrated Driver
  • Limit & Home Switches with Direction-Sensing
  • 20 kg Load Capacity
  • >20,000 Hours MTBF

These linear translation stages are designed to meet the most demanding positioning requirements in applications where space is limited. Bellows protect the ball screw and linear encoder from dusty.

PDF Brochure | Specifications, Drawings, Answers to Technical Questions
M605   Positioning stage Ultra Compact
Presion Linear Stage
M-605 XYZ Combination




M-505 Ballscrew-Driven Low Profile Linear Positioning Table


 Positioning Low Profile Translation Stage
  • High Precision Positioning Table Driven by Backlash-Free Precision Ballscrews
  • Fast: Velocity up to 50mm/second.
  • Positioning Range to 150mm (6 inches)
  • Closed-Loop Servo Motor with Integrated Driver
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Limit & Home Switches with Direction-Sensing
  • High Load Capacity
  • > 20,000 Hours MTBF

These high-load, low-profile positioning tables feature a precision-machined base of high-density, stress-relieved aluminum for exceptional stability and minimum weight. Precision-ground (better accuracy than rolled) ballscrews provide, backlash-free, low-friction and maintenance-free service.

PDF Brochure | Specifications, Drawings, Answers to Technical Questions




M-500 High-Load Linear Table with Ballscrew Drive

  • Driven by Backlash-Free Precision Ballscrews
  • High Load Capacity 100 kg
  • 4", 8" and 12" Positioning Range (102, 204 and 306mm)
  • Fast: To 125mm/second
  • Closed-Loop Servo Motor with Integrated Driver
  • Linear Encoders Option for Highest Accuracy
  • Backlash-Free Ballscrews
  • Limit & Home Switches with Direction-Sensing
  • >20000 Hours MTBF

M-500-series precision linear tables meet the most demanding positioning requirements. Despite a stiff basis with very high load capacity they are compact and light-weight an advantage when building multiaxis combinations.

PDF Brochure | Specifications, Drawings, Answers to Technical Questions

 Positioning Low-Profile

High-Load Translation Stage
M-500 XY Linear Positioning Stage

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M-511.HD Hybrid: Ultra-High Precision Nanometer-Resolution Linear Stage: Piezo + Servo Motor


Positioning Long-Travel
  • Ultra-High Precision Positioning Stage Combines Advantages of Piezo & Servomotor
  • Millisecond Settling to Nanometer Accuracy
  • 2 Nanometer Linear Encoder
  • 100mm Travel Range with up to 50mm/second
  • Active Stick/Slip & Backlash Compensation
  • Excellent Velocity Control
  • Reliable Execution of Minimal Increments
  • High Drive and Holding Forces with Minimal Power

These unique hybrid nanopositioning tables overcome the limitations of conventional precision positioning systems by combining the well-known advantages of piezo-flexure-drives (unlimited resolution and very rapid response) with the high pushing and holding forces and long Positioning Range of a servo-motor/ballscrew arrangement. The M-511.HD allows velocities to 50mm/second with 2 nm resolution and can handle loads of 50 kg for horizontal operation.

PDF Brochure | Specifications, Drawings, Answers to Technical Questions


Multi-Axis Tables





XY Micro Positioning Table for High-Resolution Microscopes

XY Piezo Linear Motor Table
  • Integrated Closed-Loop Ceramic Linear Motors Combine High Speed to 150 mm/secec and Smooth Motion
  • Significantly Higher Stability than Conventional Leadscrew-Driven Stages: Self-Locking at Rest, no Servo Dither
  • Travel Ranges to 225x85mm
  • Integrated Linear Encoders, Sensor Resolution to 0.1 ?m
  • Compact Design, Low Profile, Mounts Directly to Microscope
  • Compatible with Piezo-Z and Piezo XYZ Scanning Stages

PI XY microscope tables are designed for excellent thermal and positional stability. PILine« piezomotor-driven stages excel in precision positioning and automation applications. The low profile height makes integration easy and a choice of mechanically compatible high-resolution PI piezo nanopositioning / scanning stages adds to the versatility.

PDF Brochure | Specifications, Drawings, Answers to Technical Questions




M-545 XY Microscope Micro Positioning Table: Manual & Motorized


  • Stable Platform for Piezo Nanopositioning Scanning Systems
  • 30mm Profile for Easy Integration:
  • Positioning Range 25mm x 25mm
  • Micrometer-Driven, Motor Option Available
  • For Nikon, Zeiss, Leica and Olympus Microscopes

This XY micro positioning stage is designed to provide a stable platform for PInano« piezo nanopositioning and scanning stages as well as other PI nanopositioning stages

PDF Brochure | Specifications, Drawings, Answers to Technical Questions
Open Frame Microscope Stage




OEM Planar XY Micropositioning Scanner System

OEM Planar Scanner
  • XY Precision Positioning Table with High Load Capacity to 66kg
  • Velocity to 10 mm/second
  • 100 Nanometer Resolution Linear Encoder
  • Self-Locking
  • Direct Drive, with Servo or Stepper Motors
  • For Optics and Interferometry applications

Fast XY positioning table with precision guiding system: the M-900KOPS planar scanner was developed for OEM applications / white light interferometetry

PDF Brochure | Specifications, Drawings, Answers to Technical Questions




M-880 3-DOF Planar Micropositioning Stage


  • XY-Theta-Z Parallel Kinematics Stage with Special Controller
  • 20x20mm x 8░ Motorized Positioning Range
  • Handles 150kg Static Load
  • Servo Motors with Integrated Driver
  • Large Aperture



PDF Brochure | Specifications, Drawings, Answers to Technical Questions

3-Axis Planar  Positioning System




Z-X-Theta-Y Micropositioning System with Arbitrary Pivot Point

Goniometer Precision Positioner
  • Positioning Ranges ▒25mm (X,Z) ▒30░(Theta-Y)
  • Arbitrary Pivot Point
  • 100 Nanometer MIM
  • Servo Motors with integrated Driver
  • Parallel Kinematic Design

This tripod precision positioning table was designed to provide higher flexibility than goniometric cradles.

PDF Brochure | Specifications, Drawings, Answers to Technical Questions



Coarse/Fine XYZ Photonics Alignment System


  • XYZ Positioning Table for Photonics Alignment Applications
  • 5mm or 15mm Coarse Positioning Range
  • 100 Ám Piezo Range for high speed & Nanometer Resolution
  • Closed-Loop Option When Absolute Position Information is Required
  • Optional Stepper- & Servo Motors

F-130 & F-131 are compact computer-controllable 3-Axis nanopositioning systems for precision alignment application such as data-communication, fibers / optical components. The coarse positioners provide 50 nanometers resolution, enough to find first light and the piezo fine drives provide 1 nanometer and very fast response for quick scanning. Watch youtube video at http://www.youtube.com/v/mwQlxUDvAgI

PDF Brochure | Specifications, Drawings, Answers to Technical Questions
Compact XYZ Photonics Alignment System




Small Crossed-Roller Guided Linear Tables with Piezo Option XY and XYZ Assemblies

Linear Slide
  • XY & XYZ Precision Linear Table Assemblies
  • 18 mm Positioning Range
  • Robust Stainless-Steel Design
  • PiezoMike Option provides 10 Nanometer Resolution
  • Servo & Stepper Motor Options with 0.1 Micron Resolution

M-105 and M-106 linear slides are spring-preloaded, cross-roller bearing guided stages available in 1, 2 & 3 -axis configurations. Motor-Mike upgrades and piezo options are available for ultra-precise positioning tasks.

PDF Brochure | Specifications, Drawings, Answers to Technical Questions

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More Precision Linear Stages from PI miCos





Mini Positioners
mini positioners
Piezo Positioners
Linear Motors Stages
Precision Actuators Actuators
Multi-Axis Positioners
Hexapods
Vertical and Linear Stages
Linear Stages, Vertical Positioners
Rotation Stages
Rotation Stages

controllers
Motion Controllers

nanopositioning
Nanopositioning