Precision Positioning, Motorized Micropositioning Stage, Precision Positioning Table, Micropositioning System, Micropositioner, Micropositioning Table, Precision Motion Control Systems


Motorized Precision Positioning: Linear & Rotary Tables, Actuators, Piezomotors, Hexapods, Nanopositioning



Mini Positioners

Linear Motors, Stages

Actuators
Hexapods & Multi-Axis


Vertical & Linear Stages

Rotation Stages


Controllers


Nanopositioning


PI is a leading manufacturer of ultra-precision positioning solutions for OEM and research and offers a large range of motorized Micropositioning and piezoelectric Nanopositioning devices and systems. Our expertise spans from miniature actuators to the unique Hybrid DC/PZT Linear Slide to Hexapod 6D parallel kinematics micropositioning systems.

All linear and rotary positioners can be arranged to multi-axis combinations and many can be fitted with optional piezo drives with <1 nm resolution.

Our new line of compact Piezo Linear Motors and Linear Slide Systems are the smallest, fastest and most powerful on the market.



 

PI is the global leader in parallel kinematics 6-Axis hexapod robotics precision positioning systems. In addition to multi-axis hexapod robots, PI also offers a wide selection of innovative precision linear slides and translation stages for industrial and research applications.

Advantages: choice of motors (piezo linear motor, piezo stepping motor, voice-coil linear motor, or DC-servo / stepper with ballscrew and leadscrew); choice integration (integrated servo driver, integrated controller); piezo-upgrades.

More Information: PDF Brochures
Mini-Precision Positioners Brochure
Precision Linear Slides for Micropositioning Brochure
Piezo Motor Precision Actuators Brochure
Precision Rotary Stages Brochure
Precision Vertical & Linear Stages Brochure
XY, XYZ Multi-Axis Precision Stages Brochure
Hexapods Brochure
Precision Miniature Linear Slide Catalog

More Information: Web Links
Experience / Custom Systems
Reasons for Choosing PI
Test and Quality Control



Mini Positioners




M-122 Fast Miniature Precision Positioning Stage / Micropositioning Slide with Linear Encoder

M-122 Fast Motorized Precision Positioner Mini Linear Slide, Precision Positioning Table
  • Compact Motorized Precision Positoining Table
  • Positioning Range to 25mm
  • 0.1 µm Optical Linear Encoder for Very High Accuracy & Reproducibility
  • Min. Incremental Motion to 0.2 µm
  • Max. Velocity 20mm/second
  • Cross-Roll Bearings
  • Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes

These high-precision precision positioning linear slides combine small dimensions, very high accuracy and high speed at a competitive price. With their linear encoder and backlash-free ball-screw, these stages can provide much higher accuracy and better reproducibility than stepper motor stages or rotary encoder servo motor stages.

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M-110, M-111, M-112 High-Resolution Motorized Precision Positioner: 5, 15 & 25mm


  • Compact & High Precision Motorized Positoining Table
  • Very Cost Effective
  • Min. Incremental Motion to 50 nm
  • Max. Velocity 2mm/second
  • Closed-Loop Servo Motors or Stepper Motors
  • Limit & Home Switches
  • Ball Screw Option for High Speeds & Long Lifetimes
  • Vacuum-Option to 10-6 hPa

These ultra-high resolution linear translation stages provide 5, 15 and 25mm positioning range in a very small package. High precision leadscrews with sub-micron resolution and linear ball bearings guarantee better than 0.5 microns straightness.

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High-Resolution Motorized Precision Positioner Micro-Linear Slide with Ballscrew Drive, Precision Positioning Table


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M-116 Miniature Precision Positioning Rotary Table: Worm Gear Drive & Servo Motor

M-116  Motorized Precision Positioner Micro Rotary Stage
M-116 Precision Rotation Table with M-110 Translation Stage Series
Can be combined with
M-110 Translation Stages
  • Motorized Precision Rotary Positioner
  • Combines with M-110, -11, -12 Micropositioning Mini Slides
  • Ultra-Compact Design
  • Design Resolution: 2.5 microrad
  • Clear Aperture
  • Fast: to 20 °/second
  • Preloaded Anti-Backlash Worm Drive for Excellent Reproducibility
  • Precision Home Switch

These miniature precision positioning rotation tables are equipped with low-friction, spring-preloaded worm gear drives and closed-loop servo motors.

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Piezo Linear Motor-Driven Stages




M-661, M-662 Ultra-High-Speed Sub Miniature Precision Positioner


  • Open-Loop Piezo-Motorized Precision Positionig Table
  • Very Fast: Velocity to 500mm/second
  • Smallest Linear Translation Stage with Ultrasonic Ceramic Motor
  • 20mm Motorized Positioning Range
  • 50 Nanometer Resolution
  • XY-Combinations Available
  • Vacuum Option
  • Self Locking Ceramic Linear Motor

These very small ceramic motor-driven micropositioning translation stages provide very fast response (millisecond scale) and can accelerate rapidly to 500mm/second.

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PILine Mini Precision Positionig Table




M-663 Sub-Miniature Piezo-Motorized Linear Precision Positioning Table


M-663  Motorized Precision Positioner PILine® Miniature Linear Slide

Also available in multi-axis stacks
  • Extremely Compact Closed-Loop Micropositioning Stage with Linear Encoder and Linear Piezo Motor
  • Precise: 0.1 Micron Linear Encoder
  • Fast: to 400mm/second and 10 g Acceleration
  • Ceramic Motor with AutoLock
  • XY Table Combinations
  • Vacuum Option
  • 19mm Motorized Positioning Range
  • Self Locking Ceramic Linear Motor for Ultra-High Stability

The M-663 high-precision linear positioning table for micro-positioning applications is driven by an ultrasonic ceramic motor. It provides acceleration to 10g's and velocity to 400mm/second and autolocking feature for excellent in position stability, all unique features for a positioner that small.

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M-664 Miniature Micro-Positioning Linear Slide with Closed-Loop Piezo Linear Motor

  • Fast Precision Positioning Table: to 400mm/second and 10 g Acceleration
  • 1" Motorized Positioning Range
  • Ultra-Low Profile: 15mm
  • Precise: 0.1 Micron Linear Encoder
  • Crossed Roller Bearings for Extra High Guiding Accuracy
  • Compact XY Table Combinations
  • Self Locking Ceramic Linear Motor for Ultra-High Stability

These high-precision micro- positioning linear positioning systems are driven by an ultrasonic ceramic motor. It provides acceleration to 10g's and velocity to 400mm/second and autolocking feature for excellent in position stability, all unique features for a positioner that small. The ultra low profile of 15mm is another advantage.

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M-664 PILine®  Motorized Precision Positioner, Precision  Positioning Table, Miniature Linear Slide





M-683 Low Profile Micro-Positioning Translation Stage w/Linear Encoder & Ceramic Motor

M-683 Precision  Positioning Table,  Motorized Precision Positioner Compact Closed-Loop Translation Stage
  • Fast Precision Positioning Table with Piezo Motor: 350mm/second
  • Compact: 21mm profile height, XY Table Combination Feasilbe
  • Precise 0.1 µm Resolution Linear Encoder
  • 50mm Motorized Positioning Range
  • Crossed Roller Bearings for Excellent Guiding Accuracy
  • Ceramic Motor: Non-Magnetic Vacuum-Compatible Working Principle
  • Self-Locking at Rest

These compact micro- positioning stages employ the U-164 type PILine® ultrasonic piezo linear motor and a high precision linear encoder. High guiding accuracy is guaranteed by paired crossed-roller bearings. A vacuum option for 10-6 torr is available. The scalable design allows for positioning ranges to 300mm.

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M-686 XY Precision Positioning Stage with Piezo Linear Motors & Linear Encoders


  • Low Profile Precision XY Positioning Table with large Aperture and Piezo Motor Drive
  • 1"x1" Motorized Range
  • Self Locking Ceramic Linear Motor for Ultra-High Stability
  • Fast: Speed to 100mm/second
  • High Precision Linear Encoders: 0.1 µm Resolution
  • Large Aperture, Low Profile, Small 150x150mm Footprint
  • Compatible with PI Piezo Nanopositioning / Scanning Stages

These XY, open-frame micro- positioning stages are designed for life-science and microscopy applications. If nanometer precision is required, a piezo flexure stage can be mounted on top.

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XY  Motorized Precision Positioner Micropositioning Stage with Piezo Linear Motors, Precision  Positioning Table


Vertical & Linear Stages




M-501 Vertical Micro-Positioning System (Z-Stage)


M-501 Vertical Micropositioning Stage Motorized Precision Positioner, Precision  Positioning Table
M-531 Precision  Positioning Table, Motorized Precision Positioner
XYZ combination of M-521.DD (204 mm),
M-511.DD (102 mm) and M-501.1PD vertical stage
  • 1/2" Motorized Positioning Range (12.5mm)
  • Closed-Loop Servo Motor with Integrated Driver & Ultra-High-Resolution Encoder
  • Backlash-Free Recirculating Ballscrews
  • Precision Limit & Home Switches
  • >20,000 Hours MTBF

This vertical precision positioning table is designed fit the M-511 / M-521 / M-531 low-profile family of linear precision stages for micro-positioning applications. M-501 vertical stages feature a precision-machined base of high-stability, stress-relieved aluminum. Precision-ground recirculating ballscrews provide maintenance-free and backlash-free positioning.

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M-451 High-Load Vertical Precision Positionng Table for Micropositioning Applications

  • 1/2" Motorized Positioning Range (12.5mm)
  • 12 kg Load Capacity, High Stiffness
  • <0.1µm Minimum Incremental Motion (3 Nanometer Encoder Resolution)
  • Closed-Loop Servo Motor with Integrated Driver
  • Precision Limit & Home Switches
  • Compatible with Piezo Flexure Nanopositioning Stages & Scanners
  • Self-Locking to 12kg Load at Rest

This high-precision precision micro- positioning table is designed for high-load vertical positioning tasks. It features a precision-machined base of high-stability, stress-relieved aluminum. High precision-cross-roller guided wedges are self locking and low-friction leadscrews provide maintenance-free positioning.

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M-451 High-Load Vertical Micropositioning Stage Motorized Precision Positioner
Multiaxis Piezo Positioning Table
P-562.3CD PIMars™ XYZ piezo-nanopositioning
& scanning table (200 µm x 200 µm x 200 µm)
mounted on an M-451.1PD elevation table




M-714 Hybrid PZT/Servo-Motor Nanopositioning Table for Vertical Precision Positioning Applications


M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage  Motorized Precision Positioning
  • Hybrid Motor Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 2 Nanometer Linear Encoder Resolution
  • High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments

The M-714 precision positioning table was designed from the ground up to use the hybrid drive technology. The hybrid design overcomes the limitations of conventional precision positioning systems by combining the well-known advantages of piezo-flexure drives (unlimited resolution and very rapid response) with the long Motorized Positioning Ranges and high holding forces of a servo-motor/ballscrew arrangement. The M-714 can position loads up to 10 kg with nanometer precision over 7mm in vertical or horizontal direction. Compared to high-resolution magnetic linear drives, the hybrid principle allows high holding forces with minimum power consumption, without counterbalancing the load. The angular deviation is less than ±10 µrad over the entire Positioning Range of 7mm.

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M-311 - M-318 Sub-Miniature Micropositioning Linear Table

  • Sub-Miniature Precision Positioning Slides
  • Stainless-Steel & Linear Ball Bearings
  • X, XY and XYZ Versions
  • PiezoMike Option for Nanometer Resolution
  • Clear Aperture

The M-310 series of miniature precision positioning tables are our smallest micrometer-driven positioners. The carriage is spring preloaded against the micrometer tip for elimination of backlash. M-310 series stages are available in one-, two- or three-axis configurations. The latter consists of a two-axis stage, an angle bracket and a one-axis stage. Please note that an XY unit cannot be separated into two one-axis stages. The vertical stage in the M-313 XYZ assembly supports the load through the micrometer spindle (not the preload springs) providing excellent stability.

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M-311 – M-318 Miniature Linear Slide
M-313.80 XYZ stage with P-853 PiezoMikes
and optional M-318.20 angle bracket and
F-010.00 fiber holder


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M-011 Ultra-High-Precision, Side-Drive Linear Table with Magnetic-Kinematic Bearings


M-011 Ultra-High-Precision, Side-Drive Stages Motorized Precision Positioning
  • Compact and Highly Accurate Precision Positioning Table for Small Loads
  • Magnetically Coupled Kinematic Bearings for Excellent Straightness/Flatness ≤0.2 Microns
  • Compact Side Drive, 15mm Positioning Range
  • PZT Option for Scanning and Tracking Applications
  • 0.1 Micron Resolution with Closed-Loop Servo Motor
  • 5 Nanometer Resolution with Closed-Loop Piezo Actuator

The M-011 precision positioning stage is designed for applications where Straightness/Flatness of motion needs to be better than 0.2 Microns. This is achieved with magnetically preloaded kinematic bearings. Servo motor options and piezo options are available.

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M-014 Ultra-High-Precision, Side-Drive Linear Table with Magnetic-Kinematic Bearings

  • Compact and Highly Accurate Precision Positioning Table for Small Loads
  • 30mm Ř Aperture, 25mm Positoning Range, Compact Side Drive
  • Magnetically Coupled Kinematic Bearings for Excellent Straightness/Flatness ≤0.3 Microns
  • PZT Option for Scanning and Tracking Applications
  • 0.1 Micron Resolution with Closed-Loop Servo Motor
  • 5 Nanometer Resolution with Closed-Loop Piezo Actuator

This precision positioning table is designed for applications where Straightness/Flatness of motion needs to be better than 0.2 Microns. This is achieved with magnetically preloaded kinematic bearings. Servo motor options and piezo options are available.

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M-014 Ultra-High-Precision Side-Drive Stages Motorized Precision Positioning




M-126 High Precision Micropositioning Stage with Crossed Roller Bearings: 1" Travel


 Motorized Precision Positioning Translation Stages with Crossed Roller Bearings
  • Compact Precision Positioning Table with High Precision Crossed Roller Bearings
  • 25mm Motorized Positioning Range
  • 5 Motorized Versions + Manual
  • Better than 100 Nanometer Resolution
  • Multi-Axis Combinations
  • Limit & Home Switches with Direction-Sensing

The M-126 precision micro- positioning system is available with precision leadscrew and ballscrew drives for resolution to 100 nanometers and below with excellent reproducibility. Precision crossed roller bearings provide 2 µm straightness of travel and better.

5 closed-loop servo motor and stepper motor versions are available.

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M-403/4 M-413/4 Cost-Effective Industrial Precision Positioning Tabble / Micropositioning Slide

  • Modular Positoning System, 4 Families, Many Options, Stepper and Servo Motor Drives
  • Precision Leadscrews or Ball Screws
  • 25 to 300mm Motorized Positioning Ranges
  • Stress-Relieved 80mm or 120mm Al Base
  • High Resolution to 0.02 µm

The M-403 / M-404 and M-414 / M-414 precision positioning stage families are low cost, yet high precision translation stages for loads up to 50 kg over Motorized Positioning Ranges to 300mm. They are designed with high-value components and feature a precision-machined, high-density, stress-relieved aluminum base for exceptional stability with minimum weight.

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 Motorized Precision Positioning High-Resolution Linear Slides




M-400 Series Ultra-Precision Micropositioning Stages with Crossed Roller Bearings


 Motorized Precision Positioning M400 Series High-Precision Linear Slide
  • High Precision Positioning Table featuring Special Low-Friction Leadscrews for Very High Resolution & Reproducibility
  • 50, 100 and 150mm Motorized Positioning Range
  • Crossed Roller Bearings & Stress-Relieved Aluminum Stage Base for Highest Stability
  • Servo & Stepper-Motor Options + Manual
  • Manual Knob for Convenient Pre-Positioning
  • Limit & Home Switches with Direction-Sensing

These ultra-high resolution leadscrew-driven precision positioning stages are available with positioning ranges of 50mm, 100mm and 150mm. High precision cross-roller bearings guarantee 2 µm/100mm straightness of travel. The stage base is precision machined from high-density, stress-relieved aluminum for exceptional stability and minimum weight.

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M-605 Compact, High-Accuracy Micropositioning Slide with Linear Encoder & Bellows

  • High Precision Positioning Table featuring Linear-Scale Encoder for Highest Accuracy
  • 1" and 2" Motorized Positioning Ranges, Ultra-Compact Design
  • Dust Protection
  • Velocity up to 50mm/second.
  • Closed-Loop Servo Motor with Integrated Driver
  • Limit & Home Switches with Direction-Sensing
  • 20 kg Load Capacity
  • >20,000 Hours MTBF

These precision positioning translation stages are designed to meet the most demanding positioning requirements in applications where space is limited. Bellows protect the ball screw and linear encoder from dusty.

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M605  Motorized Precision Positioning Ultra-Compact, High-Accuracy Linear Slide

M-605 XYZ Combination




M-505 Ballscrew-Driven Low Profile Micropositioning Table


M505  Motorized Precision Positioning Low-Profile Translation Stage
  • High Precision Positioning Table Driven by Backlash-Free Precision Ballscrews
  • Fast: Velocity up to 50mm/second.
  • Motorized Positioning Range to 150mm (6 inches)
  • Closed-Loop Servo Motor with Integrated Driver
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Limit & Home Switches with Direction-Sensing
  • High Load Capacity
  • > 20,000 Hours MTBF

These high-load, low-profile motorized precision positioning tables feature a precision-machined base of high-density, stress-relieved aluminum for exceptional stability and minimum weight. Precision-ground (better accuracy than rolled) ballscrews provide, backlash-free, low-friction and maintenance-free service.

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M-500 High-Load Precision Micropositioning Linear Table with Ballscrew Drive

  • High Load Precision Positioning Table Driven by Backlash-Free Precision Ballscrews
  • High Load Capacity 100 kg
  • 4", 8" and 12" Motorized Positioning Range (102, 204 and 306mm)
  • Fast: To 125mm/second
  • Closed-Loop Servo Motor with Integrated Driver
  • Linear Encoders Option for Highest Accuracy
  • Backlash-Free Ballscrews
  • Limit & Home Switches with Direction-Sensing
  • >20000 Hours MTBF

M-500-series micro- positioning precision linear tables meet the most demanding positioning requirements. Despite a stiff basis with very high load capacity they are compact and light-weight an advantage when building multiaxis combinations.

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 Motorized Precision Positioning Low-Profile, High-Load Translation Stage


M-500 XY Linear Positioning Stage


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M-511.HD Ultra-Precision Positioning Hybrid Piezo / Servo Motor Stage


M511.HD  Motorized Precision Positioning Long-Travel, High-Speed Nanopositioning Systems
  • Ultra-High Precision Positioning Table Combines Advantages of Piezo & Servomotor
  • Millisecond Settling to Nanometer Accuracy
  • 2 Nanometer Linear Encoder
  • 100mm Motorized Positioning Range with up to 50mm/second
  • Active Stick/Slip & Backlash Compensation
  • Excellent Velocity Control
  • Reliable Execution of Minimal Increments
  • High Drive and Holding Forces with Minimal Power

These unique hybrid motorized nanopositioning tables overcome the limitations of conventional precision positioning systems by combining the well-known advantages of piezo-flexure-drives (unlimited resolution and very rapid response) with the high pushing and holding forces and long Positioning Range of a servo-motor/ballscrew arrangement. The M-511.HD allows velocities to 50mm/second with 2 nm resolution and can handle loads of 50 kg for horizontal operation.

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V-106 QuickScan Voice-Coil High-Dynamics Precision Scanning System

  • Linear-Motorized High-Speed Positioning Table (Voice-Coil) with 20mm & 6mm Psitioning Range
  • Linear Encoder Provides 0.1 µm Resolution, 0.2 µm Repeatability
  • Scanning Frequency to Tens of Hz
  • Velocity up to 270 mm/sec
  • PCI-Card Controller with On-Board Amplifiers Available
  • Scanning System with Voice Coil Drives Motorized Precision Positioning


    Piezo Motor Actuators





    N900 Non-Magnetic Linear Actuator for Precision Applications in High Magnetic Fields

    Nonmagnetic Micropositioning Actuator Motorized Precision Positioning
    • 5 N Force
    • 70mm Motorized Positioning Range
    • PiezoWalk Linear Motor Principle
    • Self-Aligning &
    • Self Locking
    • Made from non-magnetic materials

    This piezo-motor precision actuator was designed for applications in high magnetic fields, such as MRI or high-energy physics.

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    N-310 Compact High-Precision PiezoWalk® Stepping Motor Actuator


    • Push/Pull Force: 10N
    • 125mm Piezo-Motorized Positioning Range
    • Compact and Cost-Effective Design
    • Sub-Nanometer Resolution
    • Low Operating Voltage
    • Self Locking, with no Heat Dissipation, Nanometer Stability
    • Non-Magnetic and Vacuum-Compatible Working Principle

    These miniature linear actuators are driven by the PI's patented PiezoWalk® ceramic motor drives and provide positioning ranges from 10mm to 125mm in a very compact package 1x1x0.5". Depending on the sophistication of the driver electronics they provide precision in the sub-micrometer / or sub-nanometer range.

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    N-310 Compact NEXACT® OEM Piezo Stepping Drives Motorized Precision Positioning





    N-381 NEXACT® Micro-Manipulator / Nano-Manipulator, Piezo Stepper

    N-381 NEXACT® Linear Actuator, Manipulator, Piezo Stepper Motorized Precision Positioning
    • Dual-Mode Piezo Stepping Drive designed for Micro- and Nano-Manipulation
    • 30mm Positioning Range, Smooth Motion up to 10mm/second
    • High Force Generation, Very Fast Acceleration, e.g. for Cell Penetration
    • 20 nm Linear Encoder Option / or Open-Loop Operation
    • Self Locking at Rest, no Heat, no Jitter
    • Vacuum & Nonmagnetic Options

    These PiezoWalk linear-motor driven actuators have all the ingredients for micro-and nano-manipulation such as required in neuroscience, biotechnology and nanotechnology. Very smooth motion, high-dynamics with rapid acceleration, sub-nanometer resolution and high long-distance velocity of 10mm/second. The dual mode drive provides long travel walking motion and a continuous "analog mode" with piezo-class resolution and response over 7 microns. This mode can be used for rapid acceleration such as required in cell penetration applications, or smooth motion for dynamic laser tuning and also for dynamic damping of oscillations.

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    M-674 Compact Linear Actuator with Ultrasonic High Speed Motor

    M-674 PILine® RodDrive Integrated Piezo Linear Motor Drive Motorized Precision Positioning
    • 100mm Positioning Range
    • High Speed to to 400mm/second
    • Self-Locking
    • Non Magnetic Versions Feasible

    These ultrasonic precision drives can replace classic actuators and drive elements such as motor / leadscrew assemblies or magnetic linear drives, when compact size and high velocity are required.

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    M-272 Fast Micropositioning Linear Piezo-Motor Actuator for Automation


    • Fast: up to 200mm/second
    • Stable: Self Locking at Rest
    • Easy to Integrate: Complete with Linear Encoder & Guiding System

    M-272 ultrasonic-motor driven micro- positioning actuators provide a cost-effective alternative to motor-leadsrew combinations and electromagnetic linear motors when small dimensions and/or high velocity are of the essence. The ceramic motors are self-locking, with no heat generation at rest.

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    Linear Drive for Automation Motorized Precision Positioning


    Servo- and Stepper Motor Actuators





    M-228 - M-229 Low-Cost Precision Stepper-Motor Actuators

    • Cost-Efficient Design
    • 10mm / 25mm Motorized Positioning Range
    • 46 nanometers Resolution (with C-663 Controller)
    • To 80 N Push Force
    • Non-Rotating Tip
    • Direct Drive for high Speed to 5mm/second
    • Limit and Home Switches

    These low-cost micro- positioning actuators are equipped with high-resolution direct drive and gear-head stepper motors. The stepper mikes can push or pull loads up to 80 N, and provide speeds up to 5mm/second.

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    Stepper-Mike Linear Actuators with Limit Switches Motorized Precision Positioning





    M-230 Ultra-High Precision Micropositioning Actuator Servo & Stepper Motor

    High-Resolution Closed-Loop DC-Mike & Stepper Actuators Motorized Precision Positioning
    • 50 Nanometer Minimum Incremental Motion
    • Velocity to 2mm/second, Non-Rotating Tip
    • Closed-Loop Servo Motors or Stepper Motors
    • Limit and Home Switches
    • Front Mount or Clamp Mount
    • 10mm & 25mm Motorized Positioning Range
    • >5,000 Hours MTBF

    These ultra-high-resolution micro- positioning actuators come with closed-loop servo motors or stepper motors.

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    M-231 Compact High-Precision Micropositioning Actuator: 17mm Travel


    • 100 Nanometers Minimum Incremental Motion
    • 17mm Motorized Positioning Range
    • Velocity up to 2.5mm/second.
    • Closed-Loop Servo Motor
    • Home & Limit Switches
    • Compatible with M-105 Stages & F-110 Fiber Optic Aligners
    • >5,000 Hours MTBF

    The M-231 is an ultra-high-resolution linear actuator providing linear motion up to 17mm with sub-micron resolution in a compact package. It consists of a leadscrew driven by a closed-loop Servo motor/gearhead combination with motor-shaft-mounted, high-resolution encoder (2048 counts/rev.).

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M-231 High-Resolution Closed-Loop DC-Mike Actuators Motorized Precision Positioning




    M-232 Folded, High-Precision, Closed-Loop Micropositioning Actuator: 17mm


    High-Resolution, Closed-Loop DC-Mike Actuator
    • 17mm Motorized Motorized Positioning Range
    • 0.1 Micron Minimum Incremental Motion
    • Velocity up to 2.5mm/second.
    • Closed-Loop Servo Motor
    • Compatible with Leading Industrial Motion Controllers
    • Home & Limit Switches
    • Fits M-105 & F-110 Fiber Aligners
    • >5,000 Hours MTBF

    This precision micro- positioning actuator features a space-saving design with a leadscrew side-by-side to a closed-loop Servo motor.

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    M-235 High Force / High Precision Micropositioning Actuator: 20mm and 50mm

    • 120 N Push/Pull Force, 100 N Lateral Force Limit
    • Vacuum Option
    • Motorized Positioning Range to 50mm
    • 0.1 µm Minimum Incremental Motion
    • High-Speed Direct Drive Option
    • Preloaded Ultra-Low-Friction Ball Screw with Non-Rotating Tip
    • Closed-Loop Servo Motors and Stepper Motors
    • Home & Limit Switches
    • >20,000 Hours MTBF

    These high force, ultra-high-resolution micro- positioning linear actuators provide linear motion of up 20mm and 50mm, resp. with sub-micron resolution. The integrated low-friction ballscrew is driven by a closed-loop servo motor or a stepper motor.

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    M-235 Heavy-Duty High-Resolution Closed-Loop DC-Mike & Stepper Actuators




    M-238 High Force, High Precision Micropositioning Actuator with Linear Encoder: 400N, 50mm


    Heavy-Duty DC-Mike Actuators
    • 400N Force, 50mm Motorized Positioning Range, 30mm/second
    • 0.1 µm Linear Encoder Option for Ultra-High Accuracy
    • Home & Limit Switches
    • Preloaded Zero-Backlash Ball Screw
    • MTBF > 20.000 h
    • Vacuum Option

    The M-238 is a high-force micropositioning linear actuator. It provides linear motion up to 50mm, a load capacity to 400 N and high velocity to 30mm/second. Its low-friction, ballscrew, is driven by a closed-loop servo motor with integrated power amplifier. For applications with the highest precision requirements, an integrated linear encoder is available.

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    PiezoMike: Piezoelectric Micrometer Drive

    • Sub-Nanometer Resolution
    • Alternative for Standard Micrometers
    • Manual Positioning Range to 18mm
    • High-Resolution Piezo Motion to 25 Micron
    • Dynamic Operation to 10 Hz

    P-853/P-854 PiezoMikes feature a flexure guided piezo actuator combined with a manual micrometer. Sensitivity of the micrometer is 1 µm. By controlling the piezo voltage, the micrometer tip is automatically moved in and out (up to 25 µm) relative to the manually set position. Resolution of the piezoelectric motion is in the sub-nanometer range.

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    P-853 - P-854 PiezoMike: Piezoelectric Micrometer Drive




    M-227 High-Resolution Micropositioning Actuators with Servo Motors


    High-Resolution DC-Mike Actuators
    • Very Compact
    • Motorized Positioning Ranges 10mm, 25mm, 50mm
    • 50 Nanometer Minimum Incremental Motion
    • Closed-Loop Servo Motor and Non-Rotating Tip
    • Piezo Option for Sub-Nanometer Resolution
    • >5,000 Hours MTBF

    M-272 ultrasonic-motor driven micro- positioning actuators provide a cost-effective alternative to motor-leadsrew combinations and electromagnetic linear motors when small dimensions and/or high velocity are of the essence. The ceramic motors are self-locking, with no heat generation at rest.

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    M-168 High-Resolution Stepper-Mike Actuators


    • 10, 25 & 50mm Motorized Positioning Ranges
    • Resolution <0.1 Microns, 5mm/second
    • 2-Phase Stepper Motor Direct Drive
    • Convenient Prepositioning with Manual Knob
    • Piezo Option for Sub-Nanometer Resolution

    These precision stepper-motor driven micro- positioning actuators provide motion to 50mm with 0.1 micron resolution. The 2-phase stepper motor direct drive provides velocity to 5mm/second.

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    igh-Resolution Stepper-Mike Actuators


    Rotation Stages




    M-660 Fast Rotary Table. Ultra-Low Profile Micropositioner


    • Precision Rotary Table with Unlimited Motorized Positioning Range
    • Low Profile: Only 14mm in Height
    • Max. Velocity 720 °/s
    • Low Profile: Only 14mm in Height
    • Self-Locking Ceramic Direct Drive: Energy Saving & High Position Stability
    • Direct Metrology Linear Encoder, 34 µrad Resolution PILine® Direct Drive: Non-Magnetic and Vacuum- Compatible Working Principle
    • Compact Combinations with Linear Stages


      The M-660 precision rotary stage employs PILine® ultrasonic piezo ceramic motors that act on a ceramic drive ring attached to the platform. This direct drive principle allows for the compact design and low profile of the rotary stage. An integrated incremental encoder offers precision position control with up to 4 µrad resolution. The integrated U-164 PILine® linear motors provide a maximum torque of 0.3 Nm, independent from the direction of motion, and a maximum velocity of up to 720 °/second. The maximum load is 2 kg.

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    M-660 PILine® Rotation Stage





    M-060/1/2 High Performance Rotary Table Family with Worm Gear Drive

    M-060 Series of Rotation Stages with Worm Gear Drive
    • Precision Motorized Rotary Table with Worm Gear
    • Unlimited Motorized Positioning Range, speed up to 90 deg/second
    • Ultra-High Resolution
    • Preloaded Worm Drive for Zero Backlash
    • Choice of Drive: Servo motor with integrated Driver, Stepper-Motor and Manual
    • Direction - Sensing Home Switch

    M-06x series high precision rotary stages are equipped with ultra-low-friction, spring-preloaded worm gear drives allowing unlimited rotation in either direction. Models M-060 feature a 60mm diameter turntable, models M-061, a 100mm table and models M-062, a 120mm table.

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    M-116 Mini Rotary Table for Micropositioning, with Worm Gear Drive

    • Smallest Rotary Table in the PI Product Range
    • Compatible with M110, M111 & M112 Mini Linear Positioning Stage Series
    • Unlimited Motorized Positioning Range, Speed to 20 degrees/second
    • 2.5 Micro-Radian Design Resolution, 10 Microrad Micro-Radian Reproducibility
    • Clear Aperture
    • Preloaded Anti-Backlash Worm Drive
    • Precision Home Switch

    M-116 rotary stages are equipped with low-friction, spring-preloaded worm gear drives allowing unlimited rotation in either direction in an extremely compact package.

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    M-116 Micro Rotation Stage





    M-035 Small Precision Tangent-Arm Rotary Stage with Piezo & Servo Motor Option

    M-035 Compact Precision Positioning Tangent-Arm Rotation Stage
    • Compact Precision Rotation Table featureing Sub-Microradian Resolution
    • 360 Deg Coarse Rotation Range, up to 19 Deg Fine Rotation Range with <1 microradian Resolution
    • Precision Micrometer or Servo Motor Drives
    • Piezo Option for High-Resolution Scanning and Tracking
    • Ř 20mm Clear Aperture

    M-035 series precision positioning rotation stages with tangent-arm drive feature high resolution, excellent reproducibility and minimum wobble. The stages are equipped with double-row ball bearings for zero backlash and high load capacity. Both the rotation platform and the scale ring (graduated in 2-degree increments) can be independently coarse posi-tioned over 360° degrees and then locked with screws.

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    M-036 Precision Tangent-Arm Rotation Stages with Piezo & Servo Motor Option


    • Precision Rotation Table featureing Sub-Microradian Resolution
    • 360 Degrees of Coarse Rotation Range, up to 21 Degrees Fine Rotation Range
    • Precision Micrometer or Servo Motor Drives
    • Piezo Option for High-Resolution Scanning and Tracking
    • Ř 30mm Clear Aperture

    M-036 series precision rotation stages with tangent-arm drive feature high resolution, excellent reproducibility and minimum wobble. The stages are equipped with double-row ball bearings for zero backlash and high load capacity. Both the rotation platform and the scale ring (graduated in 2-degree increments) can be independently coarse positioned over 360° degrees and then locked with screws.

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    Precision Tangent-Arm Rotation Stage


    6-Axis Hexapods & Multi-Axis Stages





    M-810 6-Axis Mini Motorized Hexapod Platform

    M-810 Miniature Hexapod
    • Most-Compact Precision Hexapod Platform
    • Actuator Resolution 40 nanometers
    • Motorized Positioning Ranges 40x40x13mm, Rotation to 60 Degrees
    • Load Capacity to 5 kg
    • Min. Incremental Motion to 200 nm Reproducibility to ±0.5 Microns
    • Velocity to 10mm/second
    • Vacuum Option
    • Sophisticated Controller Using Vector Algorithms

    This miniaturized precision hexapod platform is currently PI's smallest standard 6-axis micropositioning system to date (smaller custom systems are available). As all PI hexapod platforms it allows the user to change the center of rotation (pivot point) anywhere inside or outside the system envelope.

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    M-811 Vacuum-Compatible Miniature Hexapod 6-Axis Positioner; High Precision and Very Versatile


    • Vacuum-Compatible Miniature Hexapod
    • Complete with Specialized Hexapod Controller and Software
    • Travel Ranges 34 x 32 x 13 mm, Rotation to 42 Degrees
    • Load Capacity to 5 kg
    • Actuator Resolution 40 nm
    • Min. Incremental Motion to 200 nm
    • Repeatability up to ±0.2 µm
    • Velocity to 10 mm/sec



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    M-811 Vacuum-Compatible Miniature Hexapod




    M-824 Compact Six-Axis Hexapod Platform


    M-824 Compact Six-Axis Parallel Kinematics Microrobot
    • 7 Nanometer Actuator Resolution
    • Arbitrary Center of Rotation
    • Vacuum Option
    • Load Capacity 10 kg
    • Motorized Positioning Range to 45mm (linear), 25° (rotation)
    • 300 Nanometer Min. Incremental Motion ±0.5 Micron Reproducibility
    • Self Locking to 10 kg
    • Sophisticated Controller Using Vector Algorithms

    This hexapod platform combines compact dimensions with high accuracy and load capacity. A vacuum version is available.

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    M-850 High Load Hexapod Platform

    • Up to 250kg Load Capacity
    • Actuator Resolution to 0.005 Microns
    • Arbitrary Center of Rotation (Pivot Point)
    • Works in Any Orientation
    • No Moving Cables = Higher Reliability & Precision
    • Heavy-Duty, Ultra-High-Resolution Bearings for 24/7 Applications
    • Reproducibility to ±1 Micron
    • Smaller & Stiffer Package than Conventional Multi-Axis Positioners
    • Vacuum-Option
    • Sophisticated Controller Using Vector Algorithms
    • 20000 h MTBF

    The M-850 is the ideal micropositioning system for all complex positioning tasks which depend upon high load capacity and high accuracy in six independent axes. Extremely stiff & accurate components provide an very high natural frequency of 500 Hz with a 10 kg load. As all PI hexapod platforms it allows the user to change the center of rotation (pivot point) anywhere inside or outside the system envelope.

    The M-850.50 model can achieve velocities of up to 8mm/second. In contrast, the high-load M-850.11 model provides a vertical load capacity of 250kg (50kg in any orientation).

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    M-850 Hexapod Six-Axis-Parallel Kinematics Microrobot




    M-840 Fast Six-Axis Parallel Kinematics Hexapod Platform


    M-840 HexaLight™ Six-Axis Parallel Kinematics Microrobot
    • 6 Axis Motion
    • Actuator Resolution to 0.016 Micron
    • Rapid Response
    • Motorized Positioning Ranges to 100mm/ 60°
    • No Moving Cables = Higher Reliability and Precision
    • Self-Locking Option to 30kg Load
    • Fast Direct-Drive Option to 50mm/second
    • Vacuum-Option
    • Arbitrary Center of Rotation (Pivot Point)
    • Sophisticated Controller Using Vector Algorithms
    • 20000 h MTBF

    The M-840 is the ideal micro- positioning system for all complex positioning tasks which rely on high accuracy and speed in six independent axes. In addition to positioning all axes, it allows the user to define the center of rotation (pivot point) anywhere inside or outside the system envelope by one simple software command.

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    F-206 6-Axis Precision Hexapod Platform Alignment System / Manipulator

    • Parallel Kinematics with 6 Degrees of Freedom
    • Constant-Length Strut Design w/ Friction-Free Flexure Guides
    • 33 Nanometers Actuator Resolution
    • Reproducibility 0.3 Micron in Space
    • No Moving Cables = Improved Reliability & Reduced Friction
    • Better Dynamics, More Compact than Serial Kinematics Systems
    • For Scanning and Alignment
    • Cartesian Coordinate Control with Virtualized Pivot Point.
    • Powerful Digital Controller with Open Source LabView™ Drivers, DLL Libraries...
    • Integrated Fiber Alignment Routines

    This compact Hexapod platform is a highly accurate micro- positioning system for complex multi-axis alignment tasks. It is based on PI"s long experience with ultra-high-resolution, parallel kinematics stages. The use of constant-length struts w/ backlash & friction-free flexure guides (as opposed to variable-length struts) gives the F-206 even higher precision than other hexapod designs.

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    HexAlign™ Six-Axis Precision Alignment System


    Multi-Axis Tables





    XY Micropositioning Table for High-Resolution Microscopes

    XY Piezo Linear-Motor Table
    • Integrated Closed-Loop Ceramic Linear Motors Combine High Speed to 150 mm/secec and Smooth Motion
    • Significantly Higher Stability than Conventional Leadscrew-Driven Stages: Self-Locking at Rest, no Servo Dither
    • Travel Ranges to 225x85mm
    • Integrated Linear Encoders, Sensor Resolution to 0.1 ?m
    • Compact Design, Low Profile, Mounts Directly to Microscope
    • Compatible with Piezo-Z and Piezo XYZ Scanning Stages

    PI XY microscope tables are designed for excellent thermal and positional stability. PILine® piezomotor-driven stages excel in precision positioning and automation applications. The low profile height makes integration easy and a choice of mechanically compatible high-resolution PI piezo nanopositioning / scanning stages adds to the versatility.

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    M-545 XY Microscope Micropositioning Table: Manual & Motorized


    • Stable Platform for Piezo Nanopositioning Scanning Systems
    • 30mm Profile for Easy Integration:
    • Positioning Range 25mm x 25mm
    • Micrometer-Driven, Motor Option Available
    • For Nikon, Zeiss, Leica and Olympus Microscopes

    This XY micro- positioning stage is designed to provide a stable platform for PInano® piezo nanopositioning and scanning stages as well as other PI nanopositioning stages

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    M-545 Open-Frame Microscope Stage





    OEM Planar XY Micropositioning Scanner System

    M-900K OEM Planar Scanner
    • XY Precision Positioning Table with High Load Capacity to 66kg
    • Velocity to 10 mm/second
    • 100 Nanometer Resolution Linear Encoder
    • Self-Locking
    • Direct Drive, with Servo or Stepper Motors
    • For Optics and Interferometry applications

    Fast XY positioning table with precision guiding system: the M-900KOPS planar scanner was developed for OEM applications / white light interferometetry

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    M-880 3-DOF Planar Precision Micropositioning Positioning Stage


    • XY-Theta-Z Parallel Kinematics Stage with Special Controller
    • 20x20mm x 8° Motorized Positioning Range
    • Handles 150kg Static Load
    • Servo Motors with Integrated Driver
    • Large Aperture



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    3-Axis Planar Precision Positioning System





    Z-X-Theta-Y Precision Positioning System with Arbitrary Pivot Point

    Goniometer Precision Positioner
    • Motorized Positioning Ranges ±25mm (X,Z) ±30°(Theta-Y)
    • Arbitrary Pivot Point
    • 100 Nanometer MIM
    • Servo Motors with integrated Driver
    • Parallel Kinematic Design

    This tripod precision positioning table was designed to provide higher flexibility than goniometric cradles.

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    Coarse/Fine XYZ Photonics Alignment System


    • Precision XYZ Positioning Table for Photonics Alignment Applications
    • 5mm or 15mm Coarse Motorized Positioning Range
    • 100 µm Piezo Range for high speed & Nanometer Resolution
    • Closed-Loop Option When Absolute Position Information is Required
    • Optional Stepper- & Servo Motors

    F-130 & F-131 are compact computer-controllable 3-Axis precision positioning / nanopositioning systems for precision alignment application such as fibers / optical components. The coarse positioners provide 50 nanometers resolution, enough to find first light and the piezo fine drives provide 1 nanometer and very fast response for quick scanning. Watch youtube video at http://www.youtube.com/v/mwQlxUDvAgI

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    Compact XYZ Photonics Alignment System





    Small Crossed-Roller Guided Linear Tables with Piezo Option XY and XYZ Assemblies

    Linear Slide
    • XY & XYZ Precision Linear Table Assemblies
    • 18 mm Positioning Range
    • Robust Stainless-Steel Design
    • PiezoMike Option provides 10 Nanometer Resolution
    • Servo & Stepper Motor Options with 0.1 Micron Resolution

    M-105 and M-106 linear slides are spring-preloaded, cross-roller bearing guided stages available in 1, 2 & 3 -axis configurations. Motor-Mike upgrades and piezo options are available for ultra-precise positioning tasks.

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    M-044 Tip/Tilt Stage with Piezo Drive Option for Nanometer Precision

    • One- & Two-Axis Tilt Stages
    • Zero Backlash
    • Sub-µrad Resolution
    • Manual and DC-Motor Drives
    • Compatible with Leading Industrial Motion Controllers
    • Optional Piezo Drives for Tracking and Scanning


    M-044 is a two-axis ( XX, YY) tip/tilt stage for small loads. It is spring preloaded for elimination of backlash and feature resolution and repeatability superior to that of goniometric cradles. Versions with piezo translators allow ultra-high-resolution dynamic scanning and tracking.

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    M-044 Tip/Tilt Stages


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    N-510 Ultra-High Precision Z/Tip/Tilt Platform for High Loads


    High-Force NEXLINE® Z/Tip/Tilt Platform
    • Precision Alignment in Optics, Astronomy and Semiconductor Applications
    • Self-Locking Piezoceramic Motor Design, Ultra-High Stability, with no Heat Generation
    • Ceramic Drive allows Vacuum Compatible and Non-Magnetic Versions
    • Sub-Nanometer Resolution
    • Compact Tripod Parallel-Kinematic Drive



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    M-500 Series High-Load Precision Micropositioning Linear Stages with Ballscrew Drives

    • XY-Table Combinations and XYZ Combinations
    • 4", 8" and 12" Motorized Positioning Range (102, 204 and 306mm)
    • Fast: To 125mm/second
    • Closed-Loop Servo Motor with Integrated Driver
    • Linear Encoders Option for Highest Accuracy
    • Backlash-Free Ballscrews
    • Limit & Home Switches with Direction-Sensing
    • High Load Capacity 100 kg
    • >20000 Hours MTBF

    M-500-series high accuracy linear positioning table can be combined to XY-Tables and XYZ Tables. They meet the most demanding precision positioning requirements.

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    M-500 XY Linear Stage


    XYZ combination of M-521.DD (204 mm),
    M-511.DD (102 mm) and M-501.1PD vertical stage


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    OEM Experience; See the Variety of PI Custom Stages
    Reasons for Choosing PI
    Technologies That Set PI Apart
    Download the Micropositioning Solutions / Hexapod Catalog (PDF)
    Piezo Linear Motors: PiezoWalk® vs. Ultrasonics
    PDF Catalog: Piezo Motor Linear Actuators and Stages

    For Nanopositioning Systems (Ultra-Precision Piezo Stages) Click Here
    • Sub-Nanometer Precision
    • Up to 6 Degrees of Freedom
    • Very Fast Response
    Jump to the Nanopositioning Selection Guide!

    For Piezoelectric Linear Actuators, Shear Actuators, Tubular Actuators click here
    • Sub-Nanometer Relsolution
    • Very High Forces (up to 8 Tons)
    • Sub-Millisec Response
    • Large Variety of Standard and Custom Models
    • PICMA Multilayer Type Ceramics with Ceramic Insulation
    Jump to the Piezo Selection Guide!


    Motorized Micropositioners


    M-230 ... M-238 Precision Linear Actuators (Models M-230, M-231, M-232, .....)
    • Ultra Compact
    • 50 nm minimum incremental motion (7 nm design resolution)
    • Non rotating tip, ball screws, high load, high speed versions

    PDF Files      HTML Catalog Files
                  M-227 with Optional Piezo Tip
                  M-230 (10, 25 mm, non rotating tip)
                  M-232 Compact Mike
                  M-235 HD Ball Screw
                  M-238 Ultra-High Load Precision Ball Screw Drive, Linear Encoder

    Jump to the Linear Actuators and Micrometers Selection Guide!


    Micro-Translation Stages (Models M-110 / M-111 / M-112 / M-122)
    • Ultra Compact
    • 50 nm minimum incremental motion (7 nm design resolution)
    • X, XY and XYZ Combinations

    PDF File     HTML Catalog Files

                M-110/111/M-112 Leadscrew
                M-110/111/M-112 Ballscrew
                M-122 Ballscrew, Linear Encoder, Ultra Precision

    Jump to the Micro-Stage Series Selection Guide!

    Linear Piezo-Motor-Driven Micro Stages (Models M-661, 662, 663, 682)
    • Smallest Linear Motor-Driven Translation Stages on the Market
    • Velocity to 800 mm/sec
    • Acceleration to 20 g
    • Resolution to 0.1 µm

    PDF File      HTML Catalog Files
                 M-661/M-662 Open-Loop
                 M-663 Closed-Loop
                 M-682 Closed-Loop
                 M-686 Closed-Loop XY Stage with Large Aperture
                 P-652 Sub-Miniature Motor
                 OEM Piezo Motors

    Jump to the Piezo Linear Motor Stages Selection Guide!

    Low-Cost, Long Travel Stages in 48 Variations
    • Stress-Relieved Aluminum Base for Highest Stability
    • Zero-Backlash Recirculating Ball Bearings
    • Lead-Screw-Driven

    PDF File      HTML Catalog Files
                M-403 High Resolution Translation Stage
                M-404 High Resolution Translation Stage
                M-413 High Resolution Translation Stage
                M-414 High Resolution Translation Stage

    M-605 Series Translation Stages with Linear Encoders and ActiveDrive TM
    • 50 and 25 mm Versions,
    • Integrated Linear Encoder (Direct Output Metrology)
    • Very Compact, Low Profile, Recirculating Bearings & Ball Screws
    • Integrated Servo-Amplifier

    PDF File      HTML Catalog Files
                 M-605 Precision Translation Stage       

    Hybrid Ultra-Precision DC-Servo / PZT Translation Stages with 2 Nanometer Resolution
    • Low Profile, Recirculating Bearings & Ball Screws
    • Integrated Motion Controller / Driver, Daisy-Chain up to 27
    • 100 nm minimum incremental motion

    PDF File      HTML Catalog Files
                 Hybrid 100 Millimeter X-STage
                 Hybrid 7 Millimeter Z-STage

    Jump to the Translation Stages Selection Guide!

    M-500 Translation Stages with Linear Encoders and ActiveDriveTM
    • 100 to 300 mm (12 inch) Versions
    • Low Profile, Recirculating Bearings & Ball Screws
    • Integrated Servo-Amplifier
    • Optional Linear Encoders (Direct Output Metrology)
    • Elevator Stage for Compact XYZ Combinations

    PDF File      HTML Catalog Files
                 M-501 Elevator Stage
                 M-511 Translation Stage


    Rotation Stages with ActiveDriveTM
    • Low Profile, High Precision
    • Integrated Servo-Amplifier
    • Interated Hall-Effect Home Switch

    PDF File      HTML Catalog Files
                 M-036 Precision Tangent-Arm Rotation Stages
                 M-037 Rotation Stages
                 M-060, M-061, M-062 Rotation Stages
                 M-116 Micro Rotation Stages with Worm Gear Drive


    M-041 · M-044 Tip/Tilt Stages
    • One- & Two-Axis Tilt Stages
    • Zero Backlash
    • Sub-µrad Resolution
    • Manual and DC-Motor Drives

                 M-041 · M-044 Tip/Tilt Stages

    Scanning Stages with Voice-Coil Drive
    • Fast Scanning & Positioning
    • X and XY Versions
    • Velocity up to 50 mm/secec
    • Travel Range: 5 mm

    PDF File      HTML Catalog Files
                V-106 Voice-Coil Scanning System

    Ultra-Low Inertia Hexapod Micropositioning Systems (6 Degree of Freedom Parallel-Kinematics)

    PI is the leading manufacturer of Hexapods for Optics Alignment, Micro-Machining, Handling, Photonics Alignment Engines, Medical Robots and other ultra-precise applications, with more than 10 years of experience, a great variety of standard and custom designs and hundreds of units in the field.

    Advantages of Hexapod Parallel Kinematics over "Stacked" multi-axis designs:

    • Smaller Package Size
    • Higher Stiffness
    • Reduced Position Error Accumulation
    • Better Dynamic Behavior
    • Reduced Runout Errors
    • More Precise Multi-axis Motion
    • No Moving Cables!
    More about Hexapods...

    F-130 Hybrid Photonics Alignment System


    M-313.80 used in Photonics Alignment System
    Hybrid Nanopositioning Systems

    These positioning systems combine the advantages of ultra-low inertia, high-speed PZT Nanopositioning systems and the long Travel to of classical micropositioning stages. For high-speed scanning only a very small mass needs to be moved resulting in much better response.

    Advantages are:

    • Low Inertia
    • Fast Response
    • Sub-Nanometer Resolution
    • Low Cost
    • Upgradeable Design (Motors, Piezos Drives)

    PDF File       HTML Catalog Files
                         F-130/F-131 Hybrid Aligner
                   F-130 Technote Cost-Effective OEM Alignment Workstation
                  M-105 Manual/Piezo Aligner

    Talk to Your PI Application Engineer Today
    for Your Custom or Standard Solution!


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