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| Micropositioners, Actuators, Piezomotors, Translation & Rotation Stages, Hexapods, Nanopositioning and more... |
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| PI is a leading manufacturer of ultra-precision motion control solutions for OEM and research and offers a large range of Micropositioning and Nanopositioning
devices and systems. Our expertise spans from manual actuators to the unique Hybrid
DC/PZT Linear Slide to Hexapod 6D parallel kinematics micropositioning systems.
All linear and rotary positioners can be arranged to multi-axis combinations and many can be fitted with
optional piezo drives with <1 nm resolution.
Our new line of compact Piezo Linear Motors and Linear Slide are the smallest, fastest and most powerful on the market. |
Hexapod Six-Axis Micropositioning |
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Actuators & Micrometers |
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Piezo Linear Motors & Stages |
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Motorized Miniature Slides |
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Precision Linear Slides |

6º of Freedom
Vacuum Compatible
Capacity: To 200 kg
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Travel: 10 mm-50 mm
Forces to 30 N
Resolution to 50 nm
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Fast Scanning
Ultrasonic Motor Drives
Compact
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Miniature Stages
Lead- or Ball- Screw Drive
Travel: to 25 mm or 360°
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ActiveDrive™ Motor
Lead- or Ball- Screw Drive
Travel: 5 to 306 mm
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Vertical Translation Stage |
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Rotation Stages & Tilt Stages |
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Voice Coil Scanning Stages |
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Servo & Stepper Motion Controllers |
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Nanopositioning/ Piezo Stages |

ActiveDrive™ Motor
Fast Response
Travel: to 12.5 mm (1/2")
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Forces to 100 kN
Sub-nm Resolution
Fast Response
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Scanning Freq:10s of Hz
Velocity to 240 mm/s
Travel: 20 mm / 6 mm
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Servo/Stepper/ Piezomotor Options
1-18 Channel Options
PC-Card, OEM / Rack-mount
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1-6 Axis
Sub-nm precision
Low-Profile Options
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- Travel to 25 mm
- 0.1 µm Optical Linear Encoder for Highest Accuracy & Repeatability
- Min. Incremental Motion to 0.2 µm
- Max. Velocity 20 mm/s
- Cross-Roll Bearings
- Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- Travel Ranges 5, 15 and 25 mm
- MTBF 5000 h
- Very Cost Effective
- Min. Incremental Motion to 50 nm
- Max. Velocity 2 mm/s
- Closed-Loop DC Motors and Stepper Motors
- Non-Contact Limit and Reference Switches
- Optional Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
- Vacuum-Compatible Versions Available to 10-6 hPa
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- Ultra-Compact Design
- Continuous Rotation
- 2.5 microradian Design Resolution
- Clear Aperture
- Velocity up to 20 degrees/second
- Preloaded Anti-Backlash Worm Drive
- Fits Directly on M-110 Micro Translation
Stages
- Compatible with Leading Industrial Motion
Controllers
- Non-Contact Reference Switch
- Up to 10 microradian Repeatability
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- Smallest Translation Stage with Closed-Loop Linear Motor Drive and Linear Encoder
- 20 mm Travel Range
- Velocity up to 500 mm/s
- Accelerations up to 20 g
- Resolution to 0.1 Micron
- Integrated Direct-Metrology Linear Encoder
- AutoLock Feature
- XY Combinations Available
- 20,000 h MTBF
- Vacuum Versions Available
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- Travel to 25 mm
- Max. Velocity 400 mm/s
- Ultra-Low Profile, 15 mm
- Direct Metrology Linear Encoder with 0.1 µm Resolution
- High Guiding Accuracy with Crossed Roller Bearings
- Compact XY Combinations
- Piezo Linear Motor with 6 N Drive Force
- Self Locking at Rest
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- Smallest Translation Stage with High-Speed
Linear Motor Drive
- 20 mm Travel Range
- Velocity to 500 mm/s
- Acceleration to 20 g
- Resolution to 50 Nanometer
- Self-Locking
- XY-Combinations Available
- 20000 h MTBF
- Vacuum Versions to 10-7
hPa
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- Integration of the Powerful PILine® RodDrive
- Low Profile, Compact Dimensions
- Max. Velocity 350 mm/s
- Up to 7 N Pushing Force
- Direct Metrology Linear Encoder, 0.1 µm Resolution
- Non-Magnetic and Vacuum-Compatible Versions Available
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 mm/s
- 25 x 25 mm Travel Ranges
- Integrated Linear Encoders with 0.1 µm Resolution
- Compact Design; 27 mm Profile Height, 150 x 150 mm Footprint
- Large Clear Aperture 78 x 78 mm, 66 x 66 mm in Extreme Position
- Self-Locking at Rest
- Compatible with PI Piezo Nanopositioning / Scanning Stages
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- Extremely Compact
- All-Stainless-Steel Construction
- X, XY and XYZ Versions
- Optional PiezoMike for Nanometer Resolution
- 4 mm Clear Aperture
- Linear Ball Bearings
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- Travel to to 15 mm
- Compact Side Drive
- Straightness/Flatness ≤ 0.2 Micron
- PZT Drive for Scanning and Tracking
Applications
- 0.1 Micron Resolution with Closed-Loop DC Motor
- 5 Nanometer Resolution with Closed-Loop PZT
Drive
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Parametric Search
Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- Travel to 25 mm
- Compact Side Drive
- Straightness/Flatness ≤0.3 Micron
- PZT Drive for Scanning and Tracking
Applications
- 0.1 Micron Resolution with Closed-Loop DC Motor
- 5 Nanometer Resolution with Closed-Loop PZT Drive
- 30 mm Ř Clear Aperture
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- To 25 mm Travel Range
- Manual, DC-Servo and Stepper-Motor Drives
- ActiveDrive Option
- Compatible with Leading Industrial Motion Controllers
- Crossed Roller Bearings
- <0.1 Micron Resolution
- XY and XYZ Combinations
- Direction-Sensing Origin Switch
- Non-Contact Limit Switches
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- Cost-Effective Design
- Modular System with 4 Series: M-403, M-404, M-413, M-414
- Preloaded Leadscrews or Recirculating Ball Screws
- Travel Ranges from 25 to 300 mm
- Stress-Relieved Aluminum Base 80 and 120 mm Width
- Minimum Incremental Motion to 0.1 Micron
- Resolution to 0.017 Micron
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Parametric Search
Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- Travel to 150 mm
- Stress-Relieved Aluminum Stage Base for
Highest Stability
- Crossed Roller Bearings
- Manual, DC-Servo and Stepper-Motor Drives,
ActiveDrive™ Option
- Compatible with Leading Industrial Motion
Controllers
- Manual Knob for Convenient Position
Adjustment
- Non-Contact Direction-Sensing Origin Switch
- Non-Contact Limit Switches
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- Integrated Linear-Scale Encoders for Highest
Accuracy
- Travel Ranges 25 mm (1") and 50 mm (2")
- Velocity up to 50 mm/sec.
- Active Drive™ Motors
- Compatible with Leading Industrial Motion
Controllers
- Stress-Relieved Aluminum Stage Base for
Highest Stability
- Zero-Backlash Recirculating Ballscrews
- Non-Contact, Direction-Sensing Origin Switch
- Non-Contact Limit Switches
- Load Capacity 20 kg
- >20,000 Hours MTBF
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- Travel to 150 mm (6 inches)
- Velocity up to 50 mm/sec.
- ActiveDrive™ Motors
- Compatible with Leading Industrial Motion
Controllers
- Stress-Relieved Aluminum Stage Base for
Highest Stability
- Zero-Backlash Recirculating Ballscrews
- Non-Contact Direction-Sensing Origin Switch
- Non-Contact Limit Switches
- Load Capacity 100 kg
- > 20,000 Hours MTBF
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Parametric Search
Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- Travel to 306 mm (12")
- Velocity up to 125 mm/sec.
- ActiveDrive™ Motors
- Compatible with Leading Industrial Motion
Controllers
- Linear-Scale Encoders for Highest Accuracy
- Stress-Relieved Aluminum Stage Base for
Highest Stability
- Zero-Backlash Recirculating Ballscrews
- Non-Contacting Origin and Limit Switches
- PIIntelliStage™ Version with Integrated
Controller
- Load Capacity 100 kg
- >20000 Hours MTBF
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
- 4 Nanometer Linear Encoder Resolution
- 100 mm Travel
- Velocities to 125 mm/sec
- Active Compensation of Stick/Slip During Startup and Settling
- Active Backlash Compensation
- Excellent Velocity Control
- Millisecond Settling to Nanometer Accuracy
- Reliable Execution of Minimal Increments
- High Drive and Holding Forces with Minimal Power
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Parametric Search
Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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| Voice Coil Scanning Stages |
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- Fast Scanning and Positioning
- Scanning Frequency 10s of Hz
- Travel Ranges of 20 mm and 6 mm
- Velocity up to 240 mm/s
- Linear Encoder Allows 0.2 Micron Repeatability
- Available PCI-Card Controller with On-Board
Amplifiers
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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| Actuators & Micrometers |
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- 10, 25 & 50 mm Travel Ranges
- 0.05 Micron Minimum Incremental Motion
- Non-Rotating Tip
- Closed-Loop DC Motor
- Compatible with Leading Industrial Motion
Controllers
- Sub-Nanometer Resolution with Optional PZT Drive
- >5,000 Hours
MTBF
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet |
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- Cost-Efficient Design
- To 10 mm or to 25 mm Travel Range
- 46 nm Resolution (with C-663 Controller)
- 50 N Load Capacity
- Non-Rotating Tip
- Max. Velocity 1.5 mm/s
- Non-Contact Limit and Reference Switches
Compact Design
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M-228 Product Description | M-228 Technical Data & Drawings | M-228 Models Overview / Request Pricing | M-228 PDF |
Parametric Search
M-229 Product Description | M-229 Technical Data & Drawings | M-229 Models Overview / Request Pricing | M-229 PDF
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- 10 & 25 mm Travel to
- 0.05 Micron Minimum Incremental Motion
- Non-Rotating Tip
- Velocity to 2 mm/sec.
- Closed-Loop DC Motors and Stepper Motors
- Compatible with Leading Industrial Motion
Controllers
- Integrated Hall-Effect Origin and Limit
Switches
- Front Mount or Clamp Mount
- >5,000 Hours MTB
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Parametric Search
Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- 17 mm Travel Range
- 0.1 Micron Minimum Incremental Motion
- Velocity up to 2.5 mm/sec.
- Closed-Loop DC Motor
- Compatible with Leading Industrial Motion
Controllers
- Integrated Hall-Effect Origin and Limit
Switches
- Fits M-105 & F-110 Fiber Aligners
- >5,000 Hours
MTBF
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- 17 mm Travel Range
- 0.1 Micron Minimum Incremental Motion
- Velocity up to 2.5 mm/sec.
- Closed-Loop DC Motor
- Compatible with Leading Industrial Motion
Controllers
- Integrated Hall-Effect Limit and Origin
Switches
- Fits M-105 & F-110 Fiber Aligners
- >5,000 Hours
MTBF
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- 20 mm or 50 mm Travel Range
- 0.1 Micron Minimum Incremental Motion
- High-Speed Direct Drive Option
- 120 N Push/Pull Load
- 100 N Lateral Load Limit
- Preloaded Ultra-Low-Friction Ball Screw with
Non-Rotating Tip
- Closed-Loop DC Motors and Stepper Motors
- Compatible with Leading Industrial Motion
Controllers
- Integrated Hall-Effect Limit & Origin
Switches
- >20,000 Hours MTBF
- Vacuum Versions
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Parametric Search
Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- High Load Capacity to 400 N
- Optional 0.1 Micron Direct Metrology Linear Encoder for Exceptional Precision
- Travel to to 50 mm
- Minimum Incremental Motion to 0.3 Micron
- Max. Velocity: 30 mm/s
- Preloaded Frictionless Ball Screw
- MTBF > 20.000 h
- Vacuum-Compatible Versions Available for 10-6 hPa
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- Alternative for Standard Micrometer Drives
- Manual Travel to 18 mm
- Piezoelectric High-Resolution Travel to 25
Micron
- Sub-Nanometer Resolution
- Dynamic Operation to 10 Hz
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- 20 mm Standard Travel Range
- Compact and Cost-Effective Design
- 0.03 nm Resolution
- To 10 N Push/Pull Force
- Low Operating Voltage
- Self Locking, with no Heat Dissipation, Nanometer Stability
- Non-Magnetic and Vacuum-Compatible Working Principle
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- Drive-Component for Integration into Micropositioning Systems
- Flexible Choice of Travel to Several 100 mm
- Flexible Choice of Push/Pull Forces to Several 10 N
- Minimum Incremental Motion to 0.05 Micron
- Velocity to 400 mm/s
- Self-Locking
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- Winner of the SEMI Technology Innovation
Showcase Award
- 3 mm Travel Range
- <0.1 Nanometer Resolution (Open-Loop)
- Active Force Generation to 30 N
- >50 N Holding Force
Self-Locking
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Parametric Search
Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- Winner of the SEMI Technology Innovation
Showcase Award
- 20 mm Travel Range, <0.1 Nanometer Resolution
(Open-Loop)
- Integrated High-Resolution Incremental
Encoder (Closed-Loop)
- Active Force Generation to 400 N
- >600 N Holding Force,
Self-Locking
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- 10, 25 & 50 mm Travel Ranges
- Resolution <0.1 Micron
- 2- and 5-Phase Stepper Motor
- Manual Positioning Knob
- Sub-Nanometer Resolution with Optional PZT Actuator
- >5,000 Hours MTBF
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Parametric Search Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- 1 Micron Sensitivity
- 10 Micron Graduations
- Travel up to 25 mm
- Model M-626.05 with Lockable
Spindle
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- 10, 25 and 50 mm Travel
- Pitch 0.5 mm/Rev.
- Low-Friction Construction
- 1 Micron Manual Sensitivity
- Sub-Nanometer Resolution with Optional PZT
Actuator
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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- 0.1 Micron Sensitivity
- 1 Micron Graduations
- Travel to 20 mm
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Product Description | Technical Data & Drawings | Models Overview / Request Pricing | PDF Datasheet
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Talk to Your PI Application Engineer Today
for Your Custom or Standard Solution!
Find the PI Location Closest to You
Get the new hardbound, 500
page PI Catalog
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For Piezoelectric Linear Actuators, Shear Actuators, Tubular Actuators click here
- Sub-Nanometer Relsolution
- Very High Forces (up to 8 Tons)
- Sub-Millisec Response
- Large Variety of Standard and Custom Models
- PICMA Multilayer Type Ceramics with Ceramic Insulation
Jump to the Piezo Selection Guide!
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Motorized Micropositioners
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M-230 ... M-238 Precision Linear Actuators (Models M-230, M-231, M-232, .....)
- Ultra Compact
- 50 nm minimum incremental motion (7 nm design resolution)
- Non rotating tip, ball screws, high load, high speed versions
PDF Files HTML Catalog Files
M-227 with Optional Piezo Tip
M-230 (10, 25 mm, non rotating tip)
M-232 Compact Mike
M-235 HD Ball Screw
M-238 Ultra-High Load Precision Ball Screw Drive, Linear Encoder
Jump to the Linear Actuators and Micrometers Selection Guide!
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Micro-Translation Stages (Models M-110 / M-111 / M-112 / M-122)
- Ultra Compact
- 50 nm minimum incremental motion (7 nm design resolution)
- X, XY and XYZ Combinations
PDF File HTML Catalog Files
M-110/111/M-112 Leadscrew
M-110/111/M-112 Ballscrew
M-122 Ballscrew, Linear Encoder, Ultra Precision
Jump to the Micro-Stage Series Selection Guide!
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Linear Piezo-Motor-Driven Micro Stages (Models M-661, 662, 663, 682)
- Smallest Linear Motor-Driven Translation Stages on the Market
- Velocity to 800 mm/s
- Acceleration to 20 g
- Resolution to 0.1 µm
PDF File HTML Catalog Files
M-661/M-662 Open-Loop
M-663 Closed-Loop
M-682 Closed-Loop
M-686 Closed-Loop XY Stage with Large Aperture
P-652 Sub-Miniature Motor
OEM Piezo Motors
Jump to the Piezo Linear Motor Stages Selection Guide!
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| | Low-Cost, Long Travel Stages in 48 Variations
- Stress-Relieved Aluminum Base for Highest Stability
- Zero-Backlash Recirculating Ball Bearings
- Lead-Screw-Driven
PDF File HTML Catalog Files
M-403 High Resolution Translation Stage
M-404 High Resolution Translation Stage
M-413 High Resolution Translation Stage
M-414 High Resolution Translation Stage
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M-605 Series Translation Stages with Linear Encoders and ActiveDrive
TM
- 50 and 25 mm Versions,
- Integrated Linear Encoder (Direct Output Metrology)
- Very Compact, Low Profile, Recirculating Bearings & Ball Screws
- Integrated Servo-Amplifier
PDF File HTML Catalog Files
M-605 Precision Translation Stage
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Hybrid Ultra-Precision DC-Servo / PZT Translation Stages with 2 Nanometer Resolution
- Low Profile, Recirculating Bearings & Ball Screws
- Integrated Motion Controller / Driver, Daisy-Chain up to 27
- 100 nm minimum incremental motion
PDF File HTML Catalog Files
Hybrid 100 Millimeter X-STage
Hybrid 7 Millimeter Z-STage
Jump to the Translation Stages Selection Guide!
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M-500 Translation Stages with Linear Encoders and ActiveDriveTM
- 100 to 300 mm (12 inch) Versions
- Low Profile, Recirculating Bearings & Ball Screws
- Integrated Servo-Amplifier
- Optional Linear Encoders (Direct Output Metrology)
- Elevator Stage for Compact XYZ Combinations
PDF File HTML Catalog Files
M-501 Elevator Stage
M-511 Translation Stage
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Rotation Stages with ActiveDriveTM
- Low Profile, High Precision
- Integrated Servo-Amplifier
- Interated Hall-Effect Home Switch
PDF File
HTML Catalog Files
M-036
Precision Tangent-Arm Rotation Stages
M-037 Rotation Stages
M-060, M-061, M-062 Rotation Stages
M-116
Micro Rotation Stages with Worm Gear Drive
M-041 · M-044 Tip/Tilt Stages
- One- & Two-Axis Tilt Stages
- Zero Backlash
- Sub-µrad Resolution
- Manual and DC-Motor Drives
M-041 · M-044
Tip/Tilt Stages
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Scanning Stages with Voice-Coil Drive
- Fast Scanning & Positioning
- X and XY Versions
- Velocity up to 50 mm/sec
- Travel Range: 5 mm
PDF File HTML Catalog Files
V-106
Voice-Coil Scanning System
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Ultra-Low Inertia Hexapod Micropositioning Systems (6 Degree of Freedom Parallel-Kinematics)
PI is the leading manufacturer of Hexapods for Optics Alignment, Micro-Machining, Handling, Photonics Alignment
Engines, Medical Robots and other ultra-precise applications, with more than 10 years of experience, a great variety
of standard and custom designs and hundreds of units in the field.
Advantages of Hexapod Parallel Kinematics over "Stacked" multi-axis designs:
- Smaller Package Size
- Higher Stiffness
- Reduced Position Error Accumulation
- Better Dynamic Behavior
- Reduced Runout Errors
- More Precise Multi-axis Motion
- No Moving Cables!
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| | More about Hexapods... |
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Precision Linear Slide, Miniature Slide, Motorized Slide
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Transducer, Piezo Transducers, Sensors
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Nanoautomation Piezo Stage
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Piezo Stage Solutions for Nanotechnology Applications
Precision Linear Stage, Mini Stage, Miniature Stage
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