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M-235
Precision Linear Actuators (Models M-230, M-231, M-232, .....)
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Ultra Compact
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50 nm minimum incremental motion
(7 nm design resolution)
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Non rotating tip, ball screws,
high load, high speed versions
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Piezo Linear Actuators, Shear Actuators, Tubular Actuators
- Sub-Nanometer Relsolution
- Very High Forces (up to 8 Tons)
- Sub-Millisec Response
- Large Variety of Standard and Custom Models
- PICMA Multilayer Type Ceramics with Ceramic Insulation
Click here for Selection Guide
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Micro-Translation Stages (Models M-110 / M-111 / M-112)
- Ultra Compact
- 50 nm minimum incremental motion
(7 nm design resolution)
- X, XY and XYZ Combinations
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NEW: Piezo Linear Motor Driven Micro Stages (Models M-661, 662, 663)
- Smallest Linear Motor-Driven Translation Stages on the Market
- Velocity to 800 mm/s
- Acceleration to 20 g
- Resolution to 0.1 µm
HTML-Catalog Links
M-661, 2, 3 20 mm Travel, Closed Loop & Open Loop
M-665 50 mm Travel, Closed Loop
P-661, P-665 Motors OEM Piezo Motors
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PDF Files:
M-661, 2, 3 20 mm Travel, Closed Loop & Open Loop
M-665 50 mm Travel, Closed Loop
P-661, P-665 Motors OEM Piezo Motors
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Piezo Flexure NanoPositioning Stages
- Sub-Nanometer Precision
- Up to 6 Degrees of Freedom
- Very Fast Response
Click here for Selection Guide
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IntelliStage
Translation Stages with Integrated Controllers
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Low Profile, Recirculating Bearings
& Ball Screws
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Integrated Motion Controller
/ Driver, Daisy-Chain up to 27
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100 nm minimum incremental motion
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M-500
Translation Stages with Linear Encoders and ActiveDriveTM
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100 to 300 mm (12 inch)
Versions
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Low Profile, Recirculating Bearings
& Ball Screws
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Integrated Servo-Amplifier
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Optional Linear Encoders (Direct
Output Metrology)
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Elevator Stage for Compact
XYZ Combinations
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Rotation
Stages with ActiveDriveTM
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Low Profile, High Precision
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Integrated Servo-Amplifier
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Interated Hall-Effect Home Switch
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M-605 Series
Translation Stages with Linear Encoders and ActiveDriveTM
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50 and 25 mm Versions,
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Integrated Linear Encoder (Direct
Output Metrology)
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Very Compact, Low Profile, Recirculating
Bearings & Ball Screws
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Integrated Servo-Amplifier
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Ultra-Low
Inertia Hexapod MicroPositioning Systems (6 Degree of Freedom Parallel-Kinematics)
PI is the leading manufacturer
of Hexapods for Optics Alignment, Micro-Machining, Handling, Photonics
Alignment Engines, Medical Robots and other ultra-precise applications,
with more than 10 years of experience, a great variety of standard and
custom designs and hundreds of units in the field.
Advantages of Hexapod Parallel
Kinematics over "Stacked" multi-axis designs:
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Smaller Package Size
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Higher Stiffness
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Reduced Position Error Accumulation
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Better Dynamic Behavior
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Reduced Runout Errors
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More Precise Multi-axis Motion
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NO MOVING CABLES!
More
About Hexapods
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F130 Hybrid Photonics
Alignment System
M-313.80 Micro-XYZ
Translation Stages
with PiezoMike Drives. |
Hybrid
NanoPositioning Systems
Hybrid Positioning Systems
combine the advantages of ultra-low inertia, high-speed PZT NanoPositioning
systems and the long travel range of classical micropositoining stages.
For high-speed scanning only a very small mass needs to be moved resultion
in much better response.
Advantages are:
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Low Inertia
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Fast Response
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Sub-Nanometer Resolution
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Low Cost
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Upgradeable Design (Motors,
Piezos Drives)
HTML-Catalog Links
F-130/F-131 Hybrid Aligner
F-110 Manual/Piezo Aligner
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PDF Files:
F-130 Technote Cost-Effective OEM Alignment Workstation
F-110 Manual/Piezo Aligner
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